Ionic species in 13.56 MHz discharges in CF4 gas and mixtures of it with Ar and O2

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4648-4650

  Ishikawa, Itsuo ^a   Sasaki, Shinya ^a   Nagaseki, Kazuya ^b   Saito, Yukinori ^a   Suganomata, Shinji ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

CF4 Ar mixture; CF4 O2 mixture; Mass spectrometry; Plasma potential; Positive ion; RF discharge

Indexed keywords

ARGON; BINARY MIXTURES; ELECTRIC DISCHARGES; FLUOROCARBONS; IONS; MASS SPECTROMETRY; OXYGEN;

PLASMA DISCHARGES;

PLASMAS;

EID: 0031177484     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4648     Document Type: Article

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