Fast, zero-dimensional simulation of radio frequency glow discharges for quick estimates of fluorine concentrations

IEEE Transactions on Plasma Science

Volumn 26, Issue 5, 1998, Pages 1583-1585

  Pender, J T P ^a   Brake, M L ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Plasma materials; Processing applications

Indexed keywords

COMPUTER SIMULATION; ELECTRONS; FLUORINE; FLUOROCARBONS; FUNCTIONS; MATHEMATICAL MODELS; PLASMAS;

ACTINOMETRY; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; RADIO FREQUENCY GLOW DISCHARGES;

GLOW DISCHARGES;

EID: 0032181537     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.736067     Document Type: Article

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