Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4429-4435

  Kamimura, Kazuhiro ^a   Iyanagi, Katumi ^a   Nakano, Nobuhiko ^a   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRON TRANSPORT PROPERTIES; MAGNETIC FIELDS; MAXWELL EQUATIONS; PLASMA DENSITY; PLASMA SOURCES; TWO DIMENSIONAL;

INDUCTIVELY COUPLED PLASMA; RELAXATION CONTINUUM MODEL; SPATIOTEMPORAL STRUCTURE;

PLASMA COLLISION PROCESSES;

EID: 0033157903     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4429     Document Type: Article

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