Mass transport in the epitaxial lateral overgrowth of gallium nitride

Journal of Crystal Growth

Volumn 222, Issue 1-2, 2001, Pages 144-153

  Mitchell, Christine C ^a   Coltrin, Michael E ^a   Han, Jung ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; DIFFUSION IN SOLIDS; EPITAXIAL GROWTH; ETCHING; MASKS; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES; SEMICONDUCTOR GROWTH; SILICON NITRIDE;

EPITAXIAL LATERAL OVERGROWTH (ELO); GALLIUM NITRIDE; SELECTIVE AREA GROWTH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0035148032     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00874-5     Document Type: Article

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