Dislocation density reduction via lateral epitaxy in selectively grown GaN structures

Applied Physics Letters

Volumn 71, Issue 17, 1997, Pages 2472-2474

  Zheleva, Tsvetanka S ^a   Nam, Ok Hyun ^a   Bremser, Michael D ^a   Davis, Robert F ^a  

^a Campus Box 7908   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; MASKS; METALLORGANIC VAPOR PHASE EPITAXY; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM COMPOUNDS; SILICA; SINGLE CRYSTALS; THERMAL EXPANSION; TRANSMISSION ELECTRON MICROSCOPY;

DISLOCATION DENSITY; GALLIUM NITRIDE; LATERAL EPITAXY; ORGANOMETALLIC VAPOR PHASE EPITAXY; SELECTIVE GROWTH;

DISLOCATIONS (CRYSTALS);

EID: 0031588273     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120091     Document Type: Article

References (13)

1. H. Morkoç, S. Strite, G. Gao, M. Lin, B. Sverdlov, and M. Burns, J. Appl. Phys. 76, 1363 (1994).
2. F. A. Ponce, T. D. Moustakas, I. Akasaki, and B. A. Monemar, editors, III-N Nitrides, Materials Research Society Symposium Proceedings, 1997 (unpublished), Vol. 449.
3. R. Nemanich, M. Bendjamin, S. Boseman, M. Bremser, S. King, B. Ward, R. F. Davis, B. Chen, Z. Zhang, and J. Bernholc, Materials Research Society Fall Meeting, Boston, November, 1995.
4. R. Underwood, D. Kapolnek, B. Keller, S. Keller, S. DenBaars, and U. Mishra, Topical Workshop on Nitrides, Nagoya, Japan, September, 1995.
5. O. H. Nam, M. Bremser, B. Ward, R. Nemanich, and R. F. Davis, Materials Research Society Fall Meeting, Boston, November, 1996.
6. R. Underwood, D. Kapolnek, B. Keller, S. Keller, S. DenBaars, and U. Mishra, Solid-State Electron. 41, 243 (1997).
7. Y. Kato, S. Kitamura, K. Hiramatsu, and N. Sawaki, J. Cryst. Growth 144, 133 (1994).
8. S. Kitamura, K. Hiramatsu, and N. Sawaki, Jpn. J. Appl. Phys., Part 1 34, 1184 (1985).
9. O. H. Nam, M. Bremser, B. Ward, R. Nemanich, and R. F. Davis, Jpn. J. Appl. Phys., Part 1 36, L532 (1997).
10. T. W. Weeks, Jr., M. Bremser, K. Ailey, E. Carlson, W. Perry, E. Piner, N. ElMasry, and R. F. Davis, J. Mater. Res. 11, 1011 (1996).
11. E. I. Givargizov, Oriented Crystallization on Amorphous Substrates (Plenum, New York, 1991), pp. 221-264.
12. CRC Handbook of Chemistry and Physics, 72nd ed., edited by D. Lide (CRC, Boca Raton, 1991-1992).
13. A. Varshneya, Fundamentals of Inorganic Glasses (Academic, New York, 1994), pp. 183-204.