SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 617, Issue , 2000, Pages

Photo-induced large area growth of dielectrics with excimer lamps

(2) Boyd, I W a Zhang, J Y a

a UNIVERSITY COLLEGE LONDON (United Kingdom)

Author keywords

Dielectric constant; Excimer lamp; Photo CVD; Semiconductor devices; Sol gel processing; Thin Ta2O5 film; UV annealing

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CURING; CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IRRADIATION; LEAKAGE CURRENTS; PERMITTIVITY; SOL-GELS; SPECTROPHOTOMETRY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EXCIMER LAMPS;

DIELECTRIC MATERIALS;

EID: 0034439076 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-617-j4.4 Document Type: Conference Paper

Times cited : (16)

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