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Volumn 471, Issue , 1997, Pages 53-58
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Development of large area excimer VUV and UV sources from a dielectric barrier discharge
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
DIELECTRIC FILMS;
ELECTRIC DISCHARGES;
INDUSTRIAL APPLICATIONS;
INERT GASES;
METALLIC FILMS;
OXIDATION;
PHOTOCHEMICAL REACTIONS;
PHOTONS;
SURFACE TREATMENT;
ULTRAVIOLET RADIATION;
DIELECTRIC BARRIER DISCHARGES;
EXCIMER VACUUM ULTRAVIOLET SOURCES;
ULTRAVIOLET LAMPS;
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EID: 0030688545
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-471-53 Document Type: Conference Paper |
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Times cited : (4)
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References (50)
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