Monte Carlo simulation of cluster growth and defect annealing

Materials Research Society Symposium - Proceedings

Volumn 439, Issue , 1997, Pages 383-388

  Fedorov, A V ^a   Van Veen, A ^a   De Hosson, J TH ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; DESORPTION; ION IMPLANTATION; MOLYBDENUM; MONTE CARLO METHODS; SILICON;

CLUSTER GROWTH; GAS DESORPTION TECHNIQUES;

CRYSTAL DEFECTS;

EID: 0030719079     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)