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Volumn 258-263, Issue PART 1, 1997, Pages 241-246
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Formation and structure of hydrogen molecules in crystalline Si
a,b a a |
Author keywords
Hydrogen; Raman spectroscopy; Silicon
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Indexed keywords
ANNEALING;
CRYSTALLINE MATERIALS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
HYDROGEN;
MOLECULAR STRUCTURE;
MOLECULAR VIBRATIONS;
PLASMA APPLICATIONS;
RAMAN SPECTROSCOPY;
SEMICONDUCTOR DOPING;
PLASMA TREATMENT;
VIBRATIONAL EXCITATION;
SEMICONDUCTING SILICON;
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EID: 0031384812
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.258-263.241 Document Type: Article |
Times cited : (13)
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References (18)
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