Efficient production of silicon-on-insulator films by co-implantation of He+ with H+

Applied Physics Letters

Volumn 72, Issue 9, 1998, Pages 1086-1088

  Agarwal, Aditya ^a   Haynes, T E ^a   Venezia, V C ^a   Holland, O W ^a   Eaglesham, D J ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000622334     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120945     Document Type: Article

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