Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 8-11

  Lutwyche, M ^a   Andreoli, C ^a   Binnig, G ^a   Brugger, J ^a   Drechsler, U ^a   Haeberle, W ^a   Rohrer, H ^a   Rothuizen, H ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ARRAYS; ATOMIC FORCE MICROSCOPY; DATA STORAGE EQUIPMENT; MICROMACHINING; REACTIVE ION ETCHING;

CANTILEVER ARRAYS; INTEGRATED PIEZORESISTIVE SENSING; PARALLEL IMAGING;

MICROELECTRONIC PROCESSING;

EID: 0031700205     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)