Scanning probes as a lithography tool for nanostructures

Surface Science

Volumn 386, Issue 1-3, 1997, Pages 259-264

  Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Etching; Friction; Grain boundaries; Oxidation; Piezoelectric effect; Self assembly; Surface structure, morphology, roughness and topography

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; FRICTION; GRAIN BOUNDARIES; MORPHOLOGY; NANOTECHNOLOGY; OXIDATION; PROBES; SURFACE ROUGHNESS;

SCANNING PROBE MICROSCOPY; SURFACE TOPOGRAPHY;

LITHOGRAPHY;

EID: 0031246660     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(97)00305-1     Document Type: Article

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