Force modulation atomic force microscopy recording for ultrahigh density recording

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 788-792

  Hosaka, S ^a   Koyanagi, H ^a   Kikukawa, A ^a   Miyamoto, M ^a   Nakamura, K ^a   Etoh, K ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; OPTICAL DATA STORAGE; PLASTIC DEFORMATION; POLYCARBONATES; READOUT SYSTEMS;

FORCE MODULATION; ULTRAHIGH DENSITY RECORDING;

OPTICAL RECORDING;

EID: 0031191030     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589410     Document Type: Article

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