VLSI-NEMS chip for AFM data storage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 564-569

  Despont, M ^a   Brugger, J ^a   Drechsler, U ^a   Durig, U ^a   Haberle, W ^a   Lutwyche, M ^a   Rothuizen, H ^a   Stutz, R ^a   Widmer, R ^a   Rohrer, H ^a   Binnig, G ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CROSSTALK; DATA STORAGE EQUIPMENT; HEAT SINKS; MICROMACHINING; MICROPROCESSOR CHIPS; SCHOTTKY BARRIER DIODES; SENSORS; THERMODYNAMIC STABILITY; VLSI CIRCUITS;

TIME MULTIPLEXED ROW/COLUMN ADDRESSING SCHEMES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032640075     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746890     Document Type: Conference Paper

References (13)