6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 294-302

  Ried, Robert P ^a,b,c,d,e,f   Mamin, H Jonathon ^b,e,g,h,i   Terris, Bruce D ^b,h,j,k,l   Fan, Long Sheng ^a,b,e,h   Rugar, Daniel ^a,b,g,h,m,n  

^a IEEE   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c RICE UNIVERSITY   (United States)

^d Department of Population Medicine and Diagnostic Sciences   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f LUCENT TECHNOLOGIES   (United States)

^g STANFORD UNIVERSITY   (United States)

^h AMERICAN PHYSICAL SOCIETY   (United States)

ⁱ American Vacuum Society   (United States)

^j American Vacuum Society ^*  (United States)

^k UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^l ARGONNE NATIONAL LABORATORY   (United States)

^m POMONA COLLEGE   (United States)

ⁿ ACOUSTICAL SOCIETY OF AMERICA   (United States)

more..

Author keywords

Atomic force microscope; Data storage; Mechanical thermal noise; Piezoresistive devices; Silicon tips

Indexed keywords

CRYSTAL STRUCTURE; DATA STORAGE EQUIPMENT; FABRICATION; LITHOGRAPHY; POLYCARBONATES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; SENSORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

MECHANICAL THERMAL NOISE; PIEZORESISTIVE ATOMIC FORCE MICROSCOPE CANTILEVERS; PIEZORESISTIVE DEVICES;

ATOMIC FORCE MICROSCOPY;

EID: 0031344594     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650125     Document Type: Article

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