Nanometer-scale force sensing with MEMS devices

IEEE Sensors Journal

Volumn 1, Issue 2, 2001, Pages 148-157

  Kenny, Thomas ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001555889     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2001.936932     Document Type: Article

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