Micromachined infrared sensors using tunneling displacement transducers

Review of Scientific Instruments

Volumn 67, Issue 1, 1996, Pages 112-128

  Kenny, T W ^a   Reynolds, J K ^a   Podosek, J A ^b   Vote, E C ^b   Miller, L M ^b   Rockstad, H K ^b   Kaiser, W J ^b  

^a Stanford University   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000642511     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146559     Document Type: Article

References (37)

1. E. H. Putley, in Optical and Infrared Detectors, edited by R. J. Keyes (Springer, Berlin, 1977), pp. 71-98.
2. R. C. Jones, J. Opt. Sci. Am. 43, 1 (1953).
3. J. C. Mather, Appl. Opt. 23, 584 (1984).
4. A. E. Lange, E. Kreysa, S. E. McBride, P. L. Richards, and E. E. Haller, Int. J. Infrared Millimeter Waves 4, 689 (1983).
5. P. L. Richards, J. Clarke, R. Leoni, Ph. Lerch, S. Verghese, M. R. Beasley, T. H. Geballe, R. H. Hammond, P. Rosenthal, and S. R. Spielman, Appl. Phys. Lett. 54, 283 (1989).
6. R. A. Wood, C. J. Han, and P. W. Kruse, Proceedings 1992 IEEE Sensors and Actuators Workshop (1992), p. 132.
7. M. J. E. Golay, Rev. Sci. Instrum. 18, 347 (1947).
8. M. J. E. Golay, Rev. Sci. Instrum. 20, 816 (1949).
9. A. Hadni, Essentials of Modem Physics Applied to the Study of the Infrared (Pergamon, Oxford, 1967), pp. 269-283.
10. M. J. E. Golay, Rev. Sci. Instrum. 18, 357 (1947).
11. J. B. Chevrier, K. Baert, T. Slater, and A. Verbist, Microsyst. Technol. 1, 71 (1995).
12. G. Binnig and H. Rohrer, IBM J. Res. Dev. 30, 355 (1986).
13. W. C. Young, Roark's Formulas for Stress and Strain, 6th ed. (McGraw-Hill, New York, 1989) (derived from table 24, p. 429).
14. K. E. Petersen, Proc. IEEE 70, 420 (1982).
15. S. B. Waltman and W. J. Kaiser, Sensors Actuators 19, 201 (1989).
16. T. W. Kenny, S. B. Waltman, J. K. Reynolds, and W. J. Kaiser, Appl. Phys. Lett. 58, 100 (1991).
17. A. A. Baski, T. R. Albrecht, and C. F. Quate, J. Microsc. 152, 73 (1988).
18. T. W. Kenny, W. J. Kaiser, S. B. Waltman, and J. K. Reynolds, Appl. Phys. Lett. 59, (1991).
19. T. W. Kenny, W. J. Kaiser, J. A. Podosek, H. K. Rockstad, and J. K. Reynolds, Proceedings 1992 IEEE Solid State Sensor and Actuator Workshop (1992), p. 174.
20. J. H. Wandass, J. S. Murday, and R. J. Colton, Sensors Actuators 19, 211 (1989).
21. N. C. MacDonald, Proceedings 1992 IEEE Solid State Sensor and Actuator Workshop (1992), p. 1.
22. J. J. Yao, S. C. Arney, and N. C. MacDonald, J. MicroElectroMechan. Syst. 1, 14 (1992).
23. Z. L. Zhang and N. C. MacDonald, J. MicroElectroMechan. Syst. 2, 66 (1993).
24. D. Kobayashi, T. Hirano, T. Furuhata, and H. Fujita, Proceedings 1992 IEEE MicroElectro Mechanical Systems Workshop (1992), p. 214.
25. C. Yeh and K. Najafi, Proceedings 1994 IEEE Solid State Sensor and Actuator Workshop (1994), p. 123.
26. C. Presilla, R. Onofrio, and M. F. Bocko, Phys. Rev. B 45, 3735 (1992).
27. M. F. Bocko, K. A. Stephenson, and R. H. Koch, Phys. Rev. Lett. 61, 726 (1988).
28. T. B. Gabrielson, IEEE Electron Dev. 40, 903 (1993).
29. B. Yurke and G. Kochanski, Phys. Rev. B 41, 8184 (1990).
30. Proceedings of the 1992 Tunnel Sensors Workshop, Jet Propulsion Laboratory, Pasadena, CA (to be published).
31. R. R. Spencer, B. M. Fleischer, P. W. Barth, and J. B. Angell, IEEE Trans. Electron Devices 35, 1289 (1988).
32. 2) (derived from 12, table 24 on p. 429).
33. R. Moller, A. Esslinger, and B. Koslowski, Appl. Phys. Lett. 55, 2360 (1989).
34. T. Tiedje, J. Varon, H. Deckman, and J. Stokes, J. Vac. Sci. Technol. A 6, 372 (1988).
35. Ch. Kleint, Surf. Sci. 25, 394 (1971).
36. A. L. Weisenhorn, P. K. Hansma, T. R. Albrecht, and C. F. Quate, Appl. Phys. Lett. 54, 2651 (1989).
37. Polytec Laser Vibrometer OVF-501-0, Polytec P. I. Inc., 3152 Redhill, Suite 110, Costa Mesa, CA 92626.