Micromachined infrared sensors using tunneling displacement transducers

Review of Scientific Instruments

Volumn 67, Issue 1, 1996, Pages 112-128

  Kenny, T W ^a   Reynolds, J K ^a   Podosek, J A ^b   Vote, E C ^b   Miller, L M ^b   Rockstad, H K ^b   Kaiser, W J ^b  

^a Stanford University ^*  (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000642511     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146559     Document Type: Article

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