Wafer-scale processing, assembly, and testing of tunneling infrared detectors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1241-1244

  Grade, John ^a   Barzilai, Aaron ^a   Reynolds, J Kurth ^a   Liu, Cheng Hsien ^a   Partridge, Aaron ^a   Jerman, Hal ^a   Kenny, Tom ^a  

^a Quinta Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; ELECTRODES; ELECTRON TUNNELING; IMAGE SENSORS; INFRARED RADIATION; MICROMACHINING; SEMICONDUCTOR DEVICE TESTING;

TUNNELING INFRARED DETECTORS; WAFER SCALE PROCESS;

INFRARED DETECTORS;

EID: 0030673377     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)