5 MHz, 2 N/m piezoresistive cantilevers with INCISIVE tips

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 447-450

  Ried, R P ^a   Mamin, H J ^a   Terris, B D ^a   Fan, L S ^a   Rugar, D ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA STORAGE EQUIPMENT; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

PIEZORESISTIVE CANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030717920     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)