New tunneling-based sensor for inertial rotation rate measurements

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 439-447

  Kubena, R L ^a   Vickers Kirby, D J ^a   Joyce, R J ^a   Stratton, Frederick P ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

TUNNELING-BASED SENSORS;

MICROSENSORS;

EID: 0033348325     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809059     Document Type: Article

References (10)

1. M. Lutz, W. Golderer, J. Gerstenmeier, J. Marek, B. Maihofer, S. Mahler, H. Munzel, and U. Bischof, "A precision yaw rate sensor in silicon micromachining," in Proc. 1997 Int. Conf. Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, pp. 847-850.
2. D. R. Sparks, S. R. Zarabadi, J. D. Johnson, Q. Jiang, M. Chia, O. Larson, W. Higdon, and P. Castillo-Borelley, "A CMOS integrated surface micromachined angular rate sensor: It's automotive applications,in Proc. 1997 Int. Conf. Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, pp. 851-854.
3. J. A. Geen, "A path to low cost gyroscopy," in Proc. Solid-State Sensor and Actuator Workshop. Hilton Head, SC, June 8-11, 1998, pp. 51-54.
4. R. L. Kubena, G. M. Atkinson, W. P. Robinson, and F. P. Stratton, "A new high-performance surface-micromachined tunneling accelerometer fabricated using nanolithography," J. Vac. Sci. Technol., vol. B14, no. 6, pp. 4029-4033, Nov./Dec. 1996.
5. T. W. Kenny, S. B. Waltman, J. K. Reynolds, and W. J. Kaiser, "Micromachined silicon tunnel sensor for motion detection," Appl. Phys. Lett., vol. 58, pp. 100-102, 1991.
6. C. Liu, A. M. Barzilai, J. K. Reynolds, A. Partridge, T. W. Kenny, J. D. Grade, and H. K. Rockstad, "Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution," J. Microelectromech. Syst., vol. 7, pp. 235-244, 1998.
7. R. C. Palmer, E. J. Denlinger, and H. Kawamoto, "Capacitive-pickup circuitry for videodiscs," RCA Rev., vol. 43,pp. 194-211, 1982.
8. C. Yeh and K. Najafi, "A low-voltage bulk-silicon tunneling-based microaccelerometer," in Proc. IEEE Int. Electron Devices Meeting, 1995, pp. 593-596.
9. T. B. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," IEEE Trans. Electron Devices, vol. 40, pp. 903-909, 1993.
10. J. Wang, P. M. Zavracky, N. E. McGruer, and R. H. Morrison, "Study of tunneling noise using surface micromachined tunneling tip devices," in 1997 Int. Conf. Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, pp. 467-470.