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Volumn 6, Issue 5, 2000, Pages 245-252

A study of bisazido(dimethylaminopropyl)gallium as a precursor for the OMVPE of gallium nitride thin films in a cold-wall reactor system under reduced pressure

(6) Devi, Anjana a Rogge, Wolfram a Wohlfart, Andreas a Hipler, Frank a Becker, Hans W a Fischer, Roland A a

a RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

Azides; Gallium nitride; OMVPE; Single molecule precursors; Thin films

Indexed keywords

EID: 0001157309 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(200010)6:5<245::AID-CVDE245>3.0.CO;2-1 Document Type: Article

Times cited : (79)

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