GaN growth by metallorganic vapor phase epitaxy: A comparison of modeling and experimental measurements

Journal of the Electrochemical Society

Volumn 144, Issue 5, 1997, Pages 1789-1796

  Safvi, S A ^a   Redwing, J M ^b   Tischler, M A ^b   Kuech, T F ^a  

^a University of Wisconsin Madison   (United States)

^b Advanced Technology Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; NITRIDES;

GALLIUM NITRIDE;

GALLIUM COMPOUNDS;

EID: 0031140423     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837681     Document Type: Review

References (17)

1. X. Zhang, P. Kung, A. Saxler, D. Walker, T. C. Wang, and M. Razeghi, Appl. Phys. Lett., 67, 1745 (1995).
2. T. F. Kuech, Mater. Sci. Rep. 2, 1 (1987).
3. A. C. Jones, J. Cryst. Growth, 129, 728 (1993).
4. M. Heuken, ibid., 146, 570 (1995).
5. D. A. Neumayer and J. G. Ekerdt, Chem. Mater., 8, 9 (1996).
6. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomenon, Wiley, New York (1960).
7. R. Siegel and J. R. Howell, Thermal Radiation Heat Transfer, McGraw-Hill, New York (1972).
8. R. H. Perry and C. H. Chilton, Chemical Engineer's Handbook, 5th ed., McGraw-Hill, New York (1977).
9. R. C. Reid, J. M. Prausnitz, and T. K. Sherwood, The Properties of Gases and Liquids, McGraw-Hill, New York (1977).
10. T. J. Mountziaris, S. Kalyanasundram, and N. K. Ingle, J. Cryst. Growth, 131, 283 (1993).
11. J. O. Hirschfelder, C. F. Curtiss, and R. B. Bird, Molecular Theory of Gases and Liquids, Wiley, New York (1967).
12. A. Thon and T. F. Kuech, Appl. Phys. Lett., 69, 55 (1996).
13. M. J. Almond, M. G. B. Drew, C. E. Jenkins, and D. A. Rice, J. Chem. Soc., Dalton Trans., 5 (1992).
14. M. J. Almond, C. E. Jenkins, D. A. Rice, and K. Hagen, J. Organomet. Chem., 439, 251 (1992).
15. S. H. Kim, H. S. Kim, J. S. Hwang, J. G. Choi, and P. J. Chong, Chem. Mater., 6, 278 (1994).
16. M. J. Jacko and S. W. Price, Can. J. Chem., 41, 1560 (1963).
17. G. Strang and G. Fix, An Analysis of the Finite Element Method, Prentice-Hall, Englewood Cliffs, NJ (1973).