Deposition mechanism of hydrogenated amorphous silicon

Journal of Applied Physics

Volumn 87, Issue 5, 2000, Pages 2608-2617

  Robertson, John ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000182211     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372226     Document Type: Article

References (90)

1. K. Tanaka and A. Matsuda, Mater. Sci. Rep. 2, 139 (1987).
2. A. Matsuda and T. Goto, Mater. Res. Soc. Symp. Proc. 164, 3 (1990).
3. J. Perrin, J. Non-Cryst. Solids 137, 639 (1991).
4. J. Perrin, Plasma Deposition of Amorphous Silicon Based Materials, edited by G Bruno et al. (Academic, New York, 1995), p. 177.
5. J. R. Abelson, Appl. Phys. A: Solids Surf. 56, 493 (1993).
6. M. Stutzmann, Philos. Mag. B 60, 531 (1989).
7. S. Yamasaki, Philos. Mag. B 56, 79 (1987).
8. P. Roca i Cabarrocas, Y. Bouizem, and M. L. Theye, Philos. Mag. B 65, 1025 (1992).
9. J. Perrin, O. Leroy, and M. C. Bordage, Contrib. Plasma Phys. 36, 3 (1996).
10. A. Gallagher, J. Appl. Phys. 63, 2406 (1988).
11. R. Robertson and A. Gallagher, J. Chem. Phys. 85, 3623 (1986).
12. J. Perrin, Y. Takeda, N. Hitano, Y. Takeuchi, and A. Matsuda, Surf. Sci. 210, 114 (1989).
13. A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, A. Yuuki, and J. Perrin, Surf. Sci. 227, 50 (1990).
14. J. L. Guizot, K. Nomoto, and A. Matsuda, Surf. Sci. 244, 22 (1991).
15. J. Perrin, M. Shiratani, P. Kae-Nune, H. Videlot, J. Jolly, and J. Guillon, J. Vac. Sci. Technol. A 16, 278 (1998).
16. W. Beyer, J. Non-Cryst. Solids 198, 40 (1996).
17. J. C. Knights, J. Non-Cryst. Solids 32, 393 (1977).
18. G. Ganguly and A. Matsuda, Phys. Rev. B 47, 3661 (1993).
19. G. Ganguly and A. Matsuda, J. Non-Cryst. Solids 164, 31 (1993).
20. K. Winer, Phys. Rev. B 41, 7952 (1990).
21. R. A. Street, Phys. Rev. B 43, 2454 (1991); 44, 10610 (1991).
22. R. A. Street, Phys. Rev. B 43, 2454 (1991); 44, 10610 (1991).
23. K. Gleason, K. S. Wang, M. K. Chen, and J. A. Reimer, J. Appl. Phys. 61, 2866 (1987).
24. M. J. Kushner, J. Appl. Phys. 63, 2532 (1988); M. J. McCaughey and M. J. Kushner. ibid. 65, 186 (1989).
25. M. J. Kushner, J. Appl. Phys. 63, 2532 (1988); M. J. McCaughey and M. J. Kushner. ibid. 65, 186 (1989).
26. T. Shirafuji, S. Nakajima, Y. F. Wang, T. Genji, and K. Tachibana, Jpn. J. Appl. Phys., Part 1 32, 1546 (1993).
27. K. Winer, Phys. Rev. Lett. 63, 1487 (1989); R. A. Street and K. Winer, Phys. Rev. B 40, 6236 (1989).
28. K. Winer, Phys. Rev. Lett. 63, 1487 (1989); R. A. Street and K. Winer, Phys. Rev. B 40, 6236 (1989).
29. M. J. Powell and S. C. Deane, Phys. Rev. B 48, 10815 (1993).
30. M. J. Powell and S. C. Deane, Phys. Rev. B 53, 10121 (1996).
31. J. Robertson, C. W. Chen, M. J. Powell, and S. C. Deane, J. Non-Cryst. Solids 227, 138 (1998).
32. J. Robertson and M. J. Powell, Thin Solid Films 337, 32 (1999).
33. M. Stutzmann, Philos. Mag. B 56, 63 (1987).
34. P. A. Fedders, D. A. Drabold, and S. Nakhmanson, Phys. Rev. B 58, 15624 (1998).
35. W. M. M. Kessels, R. J. Severens, M. C. M. van der Sanden, and D. C. Schram, J. Non-Cryst. Solids 227, 133 (1998).
36. L. Pauling, Nature of Chemical Bond (Cornell University Press, Itahica, 1939).
37. J. Northrup, Phys. Rev. B 44, 1419 (1991).
38. A. Vittadini, A. Selloni, R. Car, and M. Casarin, Phys. Rev. B 46, 4348 (1992).
39. C. M. Greenlief, S. M. Gates, and P. A. Holbert, J. Vac. Sci. Technol. A 7, 1845 (1989).
40. S. M. Gates, C. M. Greenlief, and D. B. Beach, J. Chem. Phys. 93, 7493 (1990).
41. Y. Toyoshima, K. Arai, A. Matsuda, and K. Tanaka, J. Non-Cryst. Solids 137, 765 (1993); Y. Toyoshima, ETL Report 979 (1996).
42. Y. Toyoshima, K. Arai, A. Matsuda, and K. Tanaka, J. Non-Cryst. Solids 137, 765 (1993); Y. Toyoshima, ETL Report 979 (1996).
43. Y. Miyoshi, Y. Yoshida, S. Miyazaki and M. Hirose, J. Non-Cryst. Solids 198, 1029 (1996); S. Miyazaki, N. Fukuhara, and M. Hirose, ibid.
44. Y. Miyoshi, Y. Yoshida, S. Miyazaki and M. Hirose, J. Non-Cryst. Solids 198, 1029 (1996); S. Miyazaki, N. Fukuhara, and M. Hirose, ibid.
45. P. Roca I. Cabarrocas, P. Gray, and A. Hadjadj, J. Vac. Sci. Technol. A 12, 655 (1996).
46. M. Takai, T. Nishimoto, T. Takagai, M. Kondo, and A. Matsuda, J. Non-Cryst. Solids (to be published).
47. C. C. Tsai, J. C. Knight, G. Chang, and B. Wacker, J. Appl. Phys. 59, 2998 (1986).
48. 3 is 0.3, presumably for geometric reasons, and this gives temperature independent growth rate, as observed.
49. Y. Muramatsu and N. Yabumoto, Appl. Phys. Lett. 49, 1230 (1986).
50. D. D. Koleske, S. M. Gates, and B. Jackson, J. Chem. Phys. 101, 3301 (1994).
51. C. M. Chiang, S. M. Gates, S. S. Lee, M. Kong, and S. F. Bent, J. Phys. Chem. B 101, 9537 (1997).
52. E. Srinivasan and G. N. Parsons, Appl. Phys. Lett. 72, 456 (1998).
53. E. Srinivasan, H. Yang, and G. N. Parsons, J. Chem. Phys. 105, 5467 (1996).
54. G. N. Parsons (private communication).
55. K. Ikuta, Y. Toyoshima, S. Yamasaki, A. Matsuda, and K. Tanaka, Mater. Res. Soc. Symp. Proc. 420, 413 (1996).
56. A. Flewitt, J. Robertson, and W. I. Milne, Mater. Res. Soc. Symp. Proc. 507, 571 (1998); A. J. Flewitt, J. Robertson, and W. I. Milne, J. Appl. Phys. 85, 8032 (1999).
57. A. Flewitt, J. Robertson, and W. I. Milne, Mater. Res. Soc. Symp. Proc. 507, 571 (1998); A. J. Flewitt, J. Robertson, and W. I. Milne, J. Appl. Phys. 85, 8032 (1999).
58. Y. M. Li, I. An, H. V. Nguyen, C. R. Wronski, and R. W. Collins, Phys. Rev. Lett. 68, 2814 (1992).
59. H. Shin, S. Miyazaki, and M. Hirose, J. Non-Cryst. Solids 137, 713 (1991).
60. M. C. M. van der Sanden, W. M. M. Kessels, A. H. M. Smets, B. A. Korevaar, R. J. Severens, and D. C. Schram, Mater. Res. Soc. Symp. Proc. (to be published).
61. S. Yamasaki, T. Umeda, J. Isoya, and K. Tanaka, Appl. Phys. Lett. 70, 1137 (1997); S. Yamasaki et al. J. Non-Cryst Solids (to be published).
62. S. Yamasaki, T. Umeda, J. Isoya, and K. Tanaka, Appl. Phys. Lett. 70, 1137 (1997); S. Yamasaki et al. J. Non-Cryst Solids (to be published).
63. D. A. Porter and K. E. Easterling, Phase Transformations in Metals and Alloys (Chapman & Hall, London, 1992), pp. 17, 308.
64. D. F. Shriver, P. W. Atkins, and C. H. Langford, Inorganic Chemistry (Oxford Unversiy Press, Oxford, 1994), p. 59.
65. R. C. Weast, Handbook of Chemistry and Physics (Chemical Rubber Corp, Boca Raton, FL, 1998).
66. W. Beyer, in Semiconductors and Semimetals, edited by J. Pankove, (Academic, New York, 1999), Vol. 61; W. Beyer and U. Zastrow, Mater. Res. Soc. Symp. Proc. 420, 497 (1996).
67. W. Beyer, in Semiconductors and Semimetals, edited by J. Pankove, (Academic, New York, 1999), Vol. 61; W. Beyer and U. Zastrow, Mater. Res. Soc. Symp. Proc. 420, 497 (1996).
68. S. Acco, D. L. Williamson, P. A. Stolk, M. J. van der Boogaard, W. C. Sinke, W. F. van Weg, S. Roorda, and P. C. Zalm, Phys. Rev. B 53, 4415 (1996).
69. S. Acco, W. Beyer, E. E. van Faassen, and W. F. van der Weg, J. Appl. Phys. 82, 2862 (1997).
70. H.
71. J. Perrin, P. Roca i Cabarrocas, B. Allan, and J. M. Friedt, Jpn. J. Appl. Phys., Part 1 27, 2041 (1988).
72. I. D. French, S. C. Deane, D. Murley, and M. J. Powell, Mater. Res. Soc. Symp. Proc. 467, 875 (1997).
73. R. Wehrspohn, S. C. Deane, I. D. French, I. Gale, J. Hewett, M. J. Powell, and J. Robertson, J. Appl. Phys. 87, 144 (2000).
74. F. J. Kampas and R. W. Griffith, Appl. Phys. Lett. 39, 407 (1981).
75. B. A. Scott, J. A. Reimer, and P. A. Longeway, J. Appl. Phys. 54, 6853 (1983).
76. A. Vittadini and A. Selloni, Chem. Phys. Lett. 235, 334 (1995).
77. K. Cho, E. Kaxiras, and J. D. Joannopoulos, Phys. Rev. Lett. 79, 5078 (1997).
78. W. B. Jackson, J. Non-Cryst. Solids 164, 263 (1993).
79. C. G. Van de Walle, Phys. Rev. B 49, 4579 (1994).
80. C. G. van de Walle, J. H. Denteneer, Y. Bar-Yam, and S. T. Pantelides, Phys. Rev. B 39, 10791 (1989).
81. K. J. Chang and J. D. Chadi, Phys. Rev. Lett. 62, 937 (1989); Phys. Rev. B 40, 11644 (1990).
82. K. J. Chang and J. D. Chadi, Phys. Rev. Lett. 62, 937 (1989); Phys. Rev. B 40, 11644 (1990).
83. H. Shirai, J. Hanna, and I. Shimizu, Jpn. J. Appl. Phys., Part 2 30, L679 (1991).
84. M. C. M. van der Sanden, W. M. M. Kessels, R. J. Severens, and D. Schram, Plasma Phys. Controlled Fusion 41, A365 (1999).
85. W. Moller, Appl. Phys. A: Solids Surf. 56, 527 (1993); D. Boutard, W. Moller, and B. M. U. Scherzer, Phys. Rev. B 38, 2988 (1988).
86. W. Moller, Appl. Phys. A: Solids Surf. 56, 527 (1993); D. Boutard, W. Moller, and B. M. U. Scherzer, Phys. Rev. B 38, 2988 (1988).
87. J. Perrin, Y. Takeda, N. Hirano, H. Matsuura, and A. Matsuda, Jpn. J. Appl. Phys., Part 1 28, 5 (1989).
88. B. Drevillon, J. Perrin, J. M. Siefert, J. Huc, G. deRosny, and J. P. M. Schmitt, Appl. Phys. Lett. 42, 801 (1983).
89. P. Roca I Cabarrocas, Appl. Phys. Lett. 65, 1674 (1995).
90. J. Dutta, U. Kroll, P. Chabloz, A. Shah, A. A. Howling, J. L. Dorier, and C. Hollenstein, Appl. Phys. Lett. 72, 3220 (1992).