Cross-sections, rate constants and transport coefficients in silane plasma chemistry

Contributions to Plasma Physics

Volumn 36, Issue 1, 1996, Pages 3-49

  Perrin, J ^b   Leroy, O ^a   Bordage, M C ^a  

^a CNRS   (France)

^b CNRS URA 277 Univ Paul Sabatier ^*

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ELECTRONS; FILM GROWTH; GROWTH KINETICS; IONS; MOLECULES; RATE CONSTANTS; SILICON COMPOUNDS; SURFACE REACTIONS;

A-SI:H; CONSTANT COEFFICIENTS; CRITICAL REVIEW; GAS-PHASES; HYDROGENATED AMORPHOUS SILICON FILMS; LOW PRESSURES; PLASMA CHEMISTRIES; SILANE PLASMAS; THERMOCHEMICAL DATA; TRANSPORT COEFFICIENT;

GLOW DISCHARGES;

EID: 0001883643     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.2150360102     Document Type: Article

References (210)

1. KUSHNER, M. J., J. Appl. Phys. 63 (1988) 2532
2. KUSHNER, M. J., J. Appl. Phys. 71 (1992) 4173
3. TAWARA, H., ITIKAWA, Y., NISHIMURA, H. and YOSHINO, M., J. Phys. Chem. Ref. Data 19 (1990) 617
4. PHELPS, A. V., J. Phys. Chem. Ref. Data 19 (1990) 653
5. KUSHNER, M. J., J. Appl. Phys. 54 (1983) 4958
6. KUSHNER, M. J., IEEE Trans. Plasma Sci. 14 (1986) 188
7. SOMMERER, T. J. and KUSHNER, M. J., J. Appl. Phys. 71 (1992) 1654
8. BORDAGE, M. C., Thèse de Doctorat d'Etat, Université Paul Sabatier, Toulouse (1995)
9. POLLOCK, W. J., Trans. Faraday Soc. 64 (1968) 2919
10. GARSCADDEN, A., DUKE, G. L. and BAILEY, W. F., Appl. Phys. Lett. 43 (1983) 1012
11. HAYASHI, M., in: Swarm Studies and inelastic electron-molecule collisions, Ed. L. C. PITCHFORD, B. V. MCKOY, A. CHUTJAN and S. THAMAR (Springer Verlag, New York, 1985) p. 167
12. OHMORI, Y., SHIMOZUMA, M., and TAGASHIRA, H., J. Phys. D: Appl. Phys. 19 (1986) 1029
13. MILLICAN, P. G., and WALKER, I. C., J. Phys. D: Appl. Phys. 20 (1987) 193
14. KURACHI, M., and NAKAMURA, Y., J. Phys. D: Appl. Phys. 22 (1989) 107
15. KURACHI, M., and NAKAMURA, Y., IEEE Trans. Plasma Sci. 19 (1991) 262
16. MORI, S., KATAYAMA, Y., and SUEOKA, O., Atom. Collisions Res. in Japan, Progress Rep. 11 (1985) 19
17. WAN, H. X., MOORE, J. H., and TOSSELL, J. A., J. Chem. Phys. 91 (1989) 7340
18. TANAKA, H., BOESTEN, L., SATO, H., KIMURA, M., DILLON, M. A., and SPENCE, D., J. Phys. B: Atom. Mol. Phys. 23 (1990) 577
19. TRONC, M., HITCHCOCK, A., and EDARD, F., J. Phys. B: Atom. Mol. Phys. 22 (1989) L207
20. MATHIESON, K. J., MILLICAN, P. G., WALKER, I. C., and CURTIS, M. G., J. Chem. Soc. Faraday Trans. 2 (1987) 1041
21. CHATHAM, H., HILS, D., ROBERTSON, R. R., and GALLAGHER, A. C., J. Chem. Phys. 81 (1984) 1770
22. PERRIN, J., SCHMITT, J. P. M., DE ROSNY, G., DRÉVILLON, B., HUC, J., and LLORET, A., Chem. Phys. 73 (1982) 383
23. SUTO, M., and LEE, L. C., J. Chem. Phys. 84 (1986) 1160
24. KAMETA, K., UTAI, M., CHIBA, R., NAGANO, K., KOUCHI., N., Hatano, Y., and TANAKA, K., J. Chem. Phys. 95 (1991) 1456
25. NAGANO, T., TOYODA, H., and SUGAI, H., Jpn. J. Appl. Phys. 30 (1991) 2912
26. DOYLE, J. R., DOUGHTY, D. A., and GALLAGHER, A., J. Appl. Phys. 68 (1990) 4375
27. PERKINS, G. G. A., AUSTIN, E. R., and LAMPE, F. W., J. Am. Chem. Soc. 101 (1979) 1109
28. GLENEWINKEL-MEYER, TH., BARTZ, J. A., THORNSON, G. M., and CRIM, F. F., J. Chem. Phys. 99 (1993) 5944
29. PERRIN, J., and SCHMITT, J. P. M., Chem. Phys. 67 (1982) 167
30. SCHMITT, J. P. M., GRESSIER, P., KRISHNAN, M., DE ROSNY, G., and PERRIN, J., Chem. Phys. 84 (1984) 281
31. DOYLE, J. R., DOUGHTY, D. A., and GALLAGHER, A., J. Appl. Phys. 71 (1992) 4771
32. PERRIN, J., and AARTS, J. F. M., Chem. Phys. 80 (1983) 351
33. SATO, T., and GOTO, T., Jpn. J. Appl. Phys. 25 (1986) 937
34. SATO, T., KONO, A., and GOTO, T., J. Chem. Phys. 88 (1988) 100
35. TINT, K., KONO, A., and GOTO, T., Jpn. J. Appl. Phys. 29 (1990) 191
36. EBINGHAUS, H., KRAUS, K., MÜLLER-DUYSING, W., and NEUERT, H., Z. Naturforschg. 19a (1964) 732
37. POTZINGER, P., and LAMPE, F. W., J. Phys. Chem. 73 (1969) 3912
38. HAALAND, P., J. Chem. Phys. 93 (1990) 4066
39. SRIVASTAVA, S. K., KRISHNAKUMAR, E., and DE SOUZA, A. C., Int. J. Mass Spectrom. Ion Proc. 107 (1991) 83
40. KRISHNAKUMAR, E., SRIVASTAVA, S. K., and IGA, I., Int. J. Mass Spectrom Ion Proc. 103 (1991) 107
41. CHRISTOPHOROU, L. G., Environmental Health Perspectives 36 (1980) 3
42. CHRISTOPHOROU, L. G., HUNTER, S. R., CARTER, J. G., and SPYROU, S. M., in Swarm Studies and Inelastic Electron-Molecule Collisions, Eds. L. C. PITCHFORD, B. V. MCKOY, A. CHUTJIAN, S. TRAJMAN (Springer Verlag, New York. 1985) p. 303
43. PAYZANT, J. D., TANAKA, K., BETOWSKI, L. D., and BOHME, D. K., J. Am. Chem. Soc. 98 (1976) 894
44. COTTRELL, T. L., and WALKER, I. C., Trans. Faraday Soc. 61 (1965) 1585
45. KURACHI, M., and NAKAMURA, Y., J. Phys. D: Appl. Phys. 21 (1988) 602
46. SHIMOZUMA, M., and TAGASHIRA, H., J. Phys. D: Appl. Phys. 19 (1986) L179
47. CAPITELLI, M., Gorse, C., WINKLER, R., and WILHELM, J., Plasma Chem. Plasma Process. 8 (1988) 399
48. WINKLER, R., CAPITELLI, M., GORSE, C., and WILHELM, J., Plasma Chem. Plasma Process. 10 (1990) 419
49. BOEUF, J. P., and BELENGUER, PH., J. Appl. Phys. 71 (1992) 4751
50. PERRIN, J., J. Phys. D: Appl. Phys. 26 (1993) 1662
51. CACCIATORE, M., CAPITELLI, M., and DILONARDO, M., Chem. Phys. 34 (1978) 193
52. CAPITELLI, M., and DILONARDO, M., Z. Naturf. 34a (1979) 585
53. LOUREIRO, J., and FERREIRA, C. M., J. Phys. D: Appl. Phys. 22 (1989) 1680
54. BÖHM, C., and PERRIN, J., J. Phys. D: Appl. Phys. 24 (1991) 865
55. PERRIN, J., BÓHM, C., ETEMADI, R., and LLORET, A., Plasma Sources Sci. Technol. 3 (1994) 252
56. GIOUMOUSIS, G., and STEVENSON, D. P., J. Chem. Phys. 29 (1958) 294
57. SU, T., and BOWERS, M. T., in Gas Phase Ion Chemistry, Ed. M. T. BOWERS, Vol. 1 (Academic Press, New York, 1979)
58. BASS, L., SU, T., CHESNAVICH, W. J., and BOWERS, M. T., Chem. Phys. Lett. 34 (1975) 119
59. CRC Hanbook of Chemistry and Physics 66th Edition, Ed. R. C. WEAST (Chemical Rubber, Boca Raton, FL, 1986)
60. HAALAND, P., Tech. Rep. AFWAL-TR-88-2043, Aero Propulsion Lab., Air Force Wright Aeronautical Lab., Wright-Patterson Air Force Base, Ohio, 1988
61. MCDANIEL, E. W., and MASON, E. A., The Mobility and Diffusion of Ions in Gases (Wiley, New York, 1973)
62. REENTS, W. D., and MANDICH, M. L., J. Chem. Phys. 93 (1990) 3270
63. CHATHAM, H., and GALLAGHER, A., J. Appl. Phys. 58 (1985) 159
64. ALLEN, W. N., CHENG, T. M. H, and LAMPE, F. W., J. Chem. Phys. 66 (1977) 3371
65. YU, T.-Y., CHENG, T. M. H, KEMPTER, V., and LAMPE, F. W., J. Phys. Chem. 76 (1972) 3321
66. CHENG, T. M. H., YU, T.-Y., and LAMPE, F. W., J. Phys. Chem. 78 (1974) 1184
67. HOWLING, A. A., SANSONNENS, L., DORIER, J.-L., and HOLLENSTEIN, CH., J. Appl. Phys. 75 (1994) 1340
68. MANDICH, M. L., REENTS, W. D., and KOLENBRANDER, K. D., J. Chem. Phys. 92 (1990) 437
69. HENIS, J. M. S., STEWART, G. W., and GASPAR, P. P., J. Chem. Phys. 58 (1973) 3639
70. DOUGHTY, D. A., and GALLAGHER, A., Phys. Rev. A 42 (1990) 6166
71. FISHER, E. R., and ARMENTROUT, P. B., J. Chem. Phys. 93 (1990) 4858
72. RADOUANI, A., Ph.D Thesis, Université Scientifique. Technologique et Médicale de Grenoble, France, 1986
73. TSUJI, M., KOBARAI, K., YAMAGUCHI, S., OBASE, H., YAMAGUCHI, K., and NISHIMURA, Y., Chem. Phys. Lett. 155 (1989) 489
74. TSUJI, M., KOBARAI, K., YAMAGUCHI, S., and NISHIMURA, Y., Chem. Phys. Lett. 158 (1989) 470
75. KONO, A., KOIKE, N., NOMURA, H., and GOTO, T., Jpn. J. Appl. Phys. 34 (1995) 307
76. GORDON, M. S., DAVIS, L. P., BURGGRAF, L. W., and DAMRAUER, R., J. Am. Chem. Soc. 108 (1986) 7889
77. PERRIN, J. LLORET, A., DE ROSNY, G., and SCHMITT, J. P. M., Int. J. Mass Spectrom. Ion Proc. 57 (1984) 249
78. MANDICH, M. L., and REENTS, W. D., J. Chem. Phys. 90 (1989) 3121
79. SCHIFF, H. L., and BOHME, D. K., Int. J. Mass Spectrom. Ion Proc. 16 (1975) 167
80. MANDICH, M. L., BONDYBEY, V. E., and REENTS, W. D., J. Chem. Phys. 86 (1987) 4245
81. COLTRIN, M. E., KEE, R. J., and MILLER, J. A., J. Electrochem. Soc. 133 (1986) 1206
82. HIRSCHFELDER, J. O., CURTISS, C. F., and BIRD, R. B., Molecular Theory of Gases and Liquids (Wiley, New-York, 1954)
83. REID, R. C., PRAUSNITZ, J. M., POLING, B. E., The Properties of Gases and Liquids 4th ed. (McGraw-Hill, New-York, 1987)
84. PERRIN, J., MOLINÀS, MATA P., and BELENGUER, PH., J. Phys. D: Appl. Phys. 27 (1995) 2499
85. KAJIWARA, T., INOUE, M., OKADA, T., MURAOKA, K., ABAZAKI, M., and MAEDA, M., Rev. Sci. Instrum. 56 (1985) 2213
86. ITABASHI, N., KATO, K., NISHIWAKI, N., GOTO, T., YAMASA, C., and HIROTA, E., Jpn. J. Appl. Phys. 28 (1989) L325
87. TANAKA, T., HIRAMATSU, M., NAWATA, M., KONO, A., and GOTO, T., J. Phys. D: Appl. Phys. 27 (1994) 1660
88. CAPITELLI, M., J. Phys. (Paris) C3 (1977) 227
89. COLTRIN, M. E., KEE, R. J., and MILLER, J. A., J. Electrochem. Soc. 131 (1984) 425
90. COLTRIN, M. E., J. Electrochem. Soc. 136 (1989) 819
91. BECERRA, R., and WALSH, R., J. Phys. Chem. 91 (1987) 5765
92. JASINSKI, J. M., and CHU, J. O., J. Chem. Phys. 88 (1988) 1678
93. RETMANN, B., MATTEN, A., LAUPERT, R., and POTZINGER, P., Ber. Buns. Ges. 81 (1977) 500
94. VISWANATHAN, R., THOMPSON, D. L., and RAFF, L. M., J. Chem. Phys. 80 (1984) 4230
95. ROENIGK, K. F., JENSEN, K. F., and CARR, R. W., J. Phys. Chem. 91 (1987) 5732
96. PURNELL, J. H., and WALSH, R., Proc. R. Soc. London A 293 (1966) 543
97. VEPREK, S., and HEINTZE, M., Plasma Chem. Plasma Process. 10 (1990) 3
98. VEPREK, S., and VEPREK-HEIJMAN, M. G. J. Appl. Phys. Lett. 56 (1990) 1766
99. VEPREK, S., and VEPREK-HEIJMAN, M. G. J., Plasma Chem. Plasma Process. 11 (1991) 323
100. KAE-NUNE P., PERRIN, J., GUILLON, J., and JOLLY, .L. Plasma Sources Sci. and Technol. 4 (1995) 250
101. ALFASSI, Z. B., and AMIEL, S., J. Chem. Phys. 57 (1972) 5085
102. MCGEE, T. M., WESTON, R. E., and FLYNN, G. W., J. Chem. Phys. 82 (1985) 3607
103. FLYNN, G. W., and WESTON, R. E. JR., Ann. Rev. Phys. Chem. 37 (1986) 551
104. GORSE, C., Chem. Phys. 161 (1992) 211
105. HETZLER, J., MILLOT, G., and STEINFELD, J. I., J. Chem. Phys. 90 (1989) 5434
106. COTTRELL, T. L., and MATHESON, A. J., Trans. Faraday Soc. 58 (1962) 2336
107. MOORE, C. B., J. Chem. Phys. 43 (1965) 2979
108. JANIESCH, W., ULRICH, H., and HESS, P., Z. Naturforsch. 31a (1976) 1203
109. CHESNOKOV, E. N., and PANFILOV, V. N., Teor. Eksp. Khim. 17 (1981) 699
110. YARDLEY, J. T., FERTIG, M. N., and MOORE, C. B., J. Chem. Phys. 52 (1970) 1450
111. AUDIBERT, M. M., JOFFRIN, C., and DUCUING, J., Chem. Phys. Lett. 25 (1974) 158
112. BOTT, J. F., J. Chem. Phys. 65 (1976) 3921
113. MILLER, R. G., and HANCOCK, J. K., J. Chem. Phys. 66 (1977) 5150
114. ORKIN, V. L., Kinet. Katal. 23 (1982) 315
115. MUL, P. M., MITCHELL, J. B. A., D'ANGELO, V. S., DEFRANCE, P., MCGOWAN, J. W., and FROELICH, H. R., J. Phys. B: At. Mol. Phys. 14 (1981) 1353
116. MUL, P. M., and MCGOWAN, J. W., Astroph. J. 237 (1980) 749
117. SMITH, D., CHURCH, M. J., and MILLER, T., J. Chem. Phys. 68 (1978) 1224
118. HICKMAN, A. P., J. Chem. Phys. 70 (1979) 4872
119. PEART, B., FORREST, R., and DOLDER, K. T., J. Phys. B: Atom. Molec. Phys. 12 (1979) L115
120. MCDANIEL, E. W., FLANNERY, M. R., THOMAS, E. W., ELLIS, H. W., and MCCANN, K. J., MANSON, S. T., GALLAGHER, J. W., RUMBLE, J. R., BEATY, E. C., and ROBERTS, T. G., Compilation of data relevant to nuclear pumped lasers, Vol. V, Technical Report H-78-1 (U.S. Army Missile Research and Development Command, Redstone Arsenal, Alabama, 1979)
121. FELDMAN, D., Z. Naturforsch. 25a (1971) 1100
122. MAKABE, T., TOCHIKUBO, F., and NISHIMURA, M., Phys. Rev. A 42 (1990) 3674
123. FLEDDERMAN, C., BEBERMAN, J., and VERDEYEN, J. T., J. Appl. Phys. 58 (1985) 134
124. VERDEYEN, J. T., BEBERMAN, J., and OVERZET, L., J. Vac. Sci. Technol. A 8 (1990) 1851
125. CHRISTODOULIDES, A.A., CHRISTOPHOROU, L. G., PAL, R. Y., and TUNG, C. M., J. Chem. Phys. 70 (1979) 1156
126. KASDAN, A., HERBST, E., and LINEBERGER, W. C., J. Chem. Phys. 62 (1975) 641
127. CHRISTOPHOROU, L. G., in Advances in Electronics and Electron Physics, Ed. L. MARTON, vol. 46 (Academic Press, New York, 1978) p 55
128. BÖHM, C., PERRIN, J., and ROCA CABARROCAS, P., J. Appl. Phys. 73 (1993) 2378
129. BÖHM, C., and PERRIN, J., Rev. Sei. Instrum. 64 (1993) 31
130. PERRIN, J., TAKEDA, Y., HIRANO, N., TAKEUCHI, Y., and MATSUDA, A., Surf. Sci. 210 (1989) 114
131. MATSUDA, A., NOMOTO, K., TAKEUCHI, Y., SUZUKI, A., YUUKI, A., and PERRIN. J., Surf. Sci. 227 (1990) 50
132. HO, P., BREILAND, W. G., and BUSS, R. J., J. Chem. Phys. 91 (1989) 2627
133. TSEREPI, A. D., and MILLER, T. A., J. Appl. Phys. 75 (1994) 7231
134. KAE NUNE, P., PERRIN, J., GUILLON, J., and JOLLY, J., submitted to Appl. Phys. Lett. (1996).
135. BOUCHOULE, A., and RANSON, P., J. Vac. Sci. Technol. A 9 (1991) 317
136. DOUGHTY, D. A., DOYLE, J. R., LIN, G. H., and GALLAGHER, A., J. Appl. Phys. 67 (1990) 6220
137. GLEASON, K. K., Wang, K. S., CHEN, M. K., and REIMER, J. A., J. Appl. Phys. 61 (1987) 2866
138. KUSHNER, M. J., J. Appl. Phys. 62 (1987) 4763
139. MCCAUGHEY, M. J., and KUSHNER, M. J., J. Appl. Phys. 65 (1989) 186
140. MATSUI, Y., YUUKI, A., MORITA, N., and TACHIBANA, K., Jpn. J. Appl. Phys. 26 (1987) 1575
141. YUUKI, A., MATSUI, Y., and TACHIBANA, K., Jpn. J. Appl. Phys. 28 (1989) 212
142. GUIZOT, J. L., NOMOTO, K., and MATSUDA, A., Surf. Sci. 244 (1991) 22
143. SHIRAFUJI, T., CHEN, W. M., YAMAMUKA, M., and TACHIBANA, K., Jpn. J. Appl. Phys. 32 (1993) 4946
144. ROBERTSON, R., and GALLAGHER, A., J. Chem. Phys. 85 (1986) 3623
145. BUSS, R. J., HO, P., BREILAND, W. G., COLTRIN, M. E., J. Appl. Phys. 63 (1988) 2808
146. GATES, S. M., Surf. Sci. 195 (1988) 307
147. GATES, S. M., GREENLIEF, C. M., BEACH, D. B., J. Chem. Phys. 93 (1990) 7493
148. GATES, S. M., KULKARNI, S. K., Appl. Phys. Lett. 58 (1991) 2963
149. JASINSKI, J. M., and GATES, S. M., Acc. Chem. Res. 24 (1991) 9
150. GERBER, R. B., Chem. Rev. 87 (1987) 29
151. BURKE, J. R., and HOLLENBACH, D. J., The Astroph. J. 265 (1983) 223
152. HERLIN, N., PÉALAT, M., LEFEBVRE, M., ALNOT, P., and PERRIN, J., Surf. Sci. 258 (1991) 381
153. ORKIN, V. L., FEDOTOV, V. G., and CHAIKIN, A. M, Kinet. Katal. 18 (1977) 55
154. GERSHENZON, Y. M., IVANOV, A. V., KUCHERYAVYI, S. I., LYAPUNOV, A. Y., and ROZENSHTEIN, V. B., Kinet. Katal. 27 (1986) 1075
155. HOLLENSTEIN, CH., DORIER. J.-L., DUTTA, J., SANSONNENS, L., and HOWLING, A. A., Plasma Sources Sei. Technol. 3 (1994) 278
156. CHOI, S. J., and KUSHNER, M. J., J. Appl. Phys. 74 (1993) 853
157. PORTEUS, R. K., Particle growth computer program, GREMI laboratory. Université of Orléans, France, unpublished, 1994
158. FRIDMAN, A., BOUFENDI, L., HBID, T., POTAPKIN, B., and BOUCHOULE, A., to appear in J. Appl. Phys. (1995)
159. BOUFENDI, L., and BOUCHOULE, A., Plasma Sources Sci. Technol. 3 (1994) 262
160. BOEUF, J. P., Phys. Rev. A 46 (1992) 7910
161. BELENGUER, PH., BLONDEAU, J. PH., BOUFENDI, L. TOOGOOD, M., PLAIN, A., BOUCHOULE, A., LAURE, C., and BOEUF, J. P., Phys. Rev. A 46 (1992) 7923
162. JANAF Thermochemical Tables, 2nd edition, (National Bureau of Standards, Washington DC, 1971) NSRDS NBS 37: 1978 supplement: J. Phys. Chem. Ref. Data 7 (1978); 1985 supplement: J. Phys. Chem. Ref. Data 14 (1985)
163. JANAF Thermochemical Tables, 2nd edition, (National Bureau of Standards, Washington DC, 1971) NSRDS NBS 37: 1978 supplement: J. Phys. Chem. Ref. Data 7 (1978); 1985 supplement: J. Phys. Chem. Ref. Data 14 (1985)
164. JANAF Thermochemical Tables, 2nd edition, (National Bureau of Standards, Washington DC, 1971) NSRDS NBS 37: 1978 supplement: J. Phys. Chem. Ref. Data 7 (1978); 1985 supplement: J. Phys. Chem. Ref. Data 14 (1985)
165. SAX, A. F., and KALCHER, J., J. Phys. Chem. 95 (1991) 1768
166. HO, P., and MELIUS, C. F., J. Phys. Chem. 94 (1990) 5120
167. SCHMUDE, R. W., RAN, Q., GINGERICH, K. A., and KINGCADE, J. E., J. Chem. Phys. 102 (1995) 2574
168. RAGHAVACHARI, K., and MCMICHAEL, ROHLFING, C., J. Chem. Phys. 89 (1988) 2219
169. NIMLOS, M. R., and ELLISON, G. B., J. Am. Chem. Soc. 108 (1986) 6522
170. KALCHER, J., and SAX, A. F., Chem. Phys. Lett. 150 (1988) 99
171. KALCHER, J., and SAX, A. F., Chem. Phys. Lett. 133 (1987) 135
172. ERVIN, K. M., and LINEBERGER, W. C., J. Phys. Chem. 95 (1991) 1167
173. ARNOLD, C. C., KITSOPOULOS, T. N., and NEUMARK, D. M., J. Chem. Phys. 99 (1993) 766
174. KITSOPOULOS, T. N., CHICK, C. J., WEAVER, A., and NEUMARK, D.M., J. Chem. Phys. 93 (1990) 6108
175. CHESHNOVSKY, O., YANG, S. H., PETTIETTE, C. L., CRAYCHAFT, M. J., LIU, Y., and SMALLEY, R. E., Chem. Phys Lett. 138 (1987) 119
176. RACHAVACHARI, K., and MCMICHAEL, ROHLFING, C., J. Chem. Phys. 94 (1991) 3670
177. BERKOWITZ, J., GREEN, J. P., CHO, H. and RUSCIC, B., J. Chem. Phys. 86 (1987) 1235
178. RUSCIC, B., and BERKOWITZ, J., J. Chem. Phys. 95 (1991) 2407
179. BOCK, H., ENSSLIN, W., FEHER, F., and FREUND, R., J. Am. Chem. Soc. 98 (1976) 668
180. RUSCIC, B., and BERKOWTTZ, J., J. Chem. Phys. 95 (1991) 2416
181. CURTISS, L. A., RAGHAVACHARI, K., DEUTSCH, P. W., and POPLE, J. A., J. Chem. Phys. 95 (1991) 2433
182. CHATILLON, C., ALLIBERT, M., and PATTORET, A., C.R. Hebd. Séances Acad. Sci. Ser. C 280 (1975) 1505
183. TREVOR, D. J., COX, D.M., REICHMANN, K. C., BRICKMAN, R. O., and KALDOR, A., J. Phys. Chem. 91 (1987) 2598
184. HIGO, M., KAMATA, S., and OGAWA, T., Chem. Phys. 66 (1982) 243
185. PERRIN, J., and SCHMITT, J. P. M., Chem. Phys. Lett. 112 (1984) 69
186. KNIGHTS, J. C., SCHMITT, J. P. M., PERRIN, J., and GUELACHVILI, G., J. Chem Phys. 76 (1982) 3414
187. PERRIN, J., and DELAFOSSE, E., J. Phys. D: Appl. Phys. 13 (1980) 759
188. CHENG, T. M. H., and LAMPE, F. W., Chem. Phys. Lett. 19 (1973) 532
189. MANDICH, M. L., REENTS, W. D., and JARROLD, M. F., J. Chem. Phys. 88 (1988) 1703
190. HENIS, J. M. S., STEWART, G. W., TRIPODI, M. K., and GASPAR, P. P., J. Chem. Phys. 57 (1972) 389
191. REENTS, W. D., MANDICH, M. L., and WANG, C. R. C., J. Chem. Phys. 97 (1992) 7226
192. MANDICH, M. L., and REENTS, W. D., J. Chem. Phys. 95 (1991) 7360
193. REENTS, W. L., and MANDICH, M. L., J. Chem. Phys. 96 (1992) 4429
194. REENTS, W. L., and MANDICH, M. L., Plasma Sources Sci. Technol. 3 (1994) 373
195. CHATHAM, H., HILS, D., ROBERTSON, R. R., and GALLAGHER, A.C., J. Chem. Phys. 79 (1983) 1301
196. YOSHIDA, H., MOISHIMA, Y., UKAI, M., SHINKASA, K., KOUCHI, N., and HATONO, Y., Chem. Phys. Lett. 176 (1991) 173
197. JAUBERTEAU, J. L., CONTE, D., BARATRON, M. I., QUINTARD, P., AUBRETON, J., and CATHERINOT, A., Plasma Chem. Plasma Proc. 10 (1990) 401
198. SVEHLA, R. A., NASA Report, NASA-TR 132 (1962)
199. AUSTIN, E. R., and LAMPE, F. W., J. Phys. Chem. 81 (1977) 1134
200. LOH, S. K., and JASINSKI, J. M., J.Chem. Phys. 95 (1991) 4914
201. BEGEMANN, M. H., DREYFUS, R. W., and JASINSKI, J. M., Chem. Phys. Lett. 155 (1989) 351
202. NEMOTO, M., SUZUKI, A., NAKAMURA, H., SHIBUYA, K., and OBI, K., Chem. Phys. Lett. 162 (1989) 467
203. DIETRICH, T. R., CHIUSSI, S., MAREK, M., ROTH, A., and COMES, F. J., J. Phys. Chem 95 (1991) 9302
204. INOUE, G., and SUZUKI, M., Chem. Phys. Lett. 122 (1985) 361
205. BAGGOTT, J. E., FREY, H. M., LIGHTFOOT, P. D., WALSCH, R., and WATTS, I. M, J. Chem. Soc. Faraday Trans. 86 (1990) 27
206. BECERRA, R., FREY, H. M., MASON, B. P., WALSH, R., and GORDON, M. S., J. Am. Chem. Soc. 114 (1992) 2751
207. POLLOCK, T. L., SANDHU, H. S., JODHAN, A., and STRAUSZ, O. P., J. Am. Chem. Soc. 95 (1973) 1017
208. ITABASHI, N., NISHIWAKI, N., MAGANE, M., NAITO, S., GOTO, T., MATSUDA, A., YAMADA, C., and HIROTA, E., Jpn. J. Appl. Phys. 29 (1990) L505
209. LOH, S. K., BEACH, D. B., and JASINSKI, J. M., Chem. Phys. Lett. 169 (1990) 55
210. KOSHI, M., MIYOSHI, A., and MATSUI, H., Chem. Phys. Lett. 184 (1991) 442