Hydrogen abstraction kinetics and crystallization in low temperature plasma deposition of silicon

Applied Physics Letters

Volumn 72, Issue 4, 1998, Pages 456-458

  Srinivasan, Easwar ^a   Parsons, Gregory N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001126367     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120785     Document Type: Article

References (17)

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