Doping porous silicon with erbium: Pores filling as a method to limit the Er-clustering effects and increasing its light emission

Scientific Reports

Volumn 7, Issue 1, 2017, Pages

  Mula, Guido ^a   Printemps, Tony ^b,c   Licitra, Christophe ^b,c   Sogne, Elisa ^d   D'Acapito, Francesco ^e   Gambacorti, Narciso ^b,c   Sestu, Nicola ^a   Saba, Michele ^a   Pinna, Elisa ^a   Chiriu, Daniele ^a   Ricci, Pier Carlo ^a   Casu, Alberto ^d   Quochi, Francesco ^a   Mura, Andrea ^a   Bongiovanni, Giovanni ^a   Falqui, Andrea ^d  

^a UNIVERSITY OF CAGLIARI   (Italy)

^b UNIV GRENOBLE ALPES   (France)

^c CEA GRENOBLE   (France)

^d KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

^e IOM CNR LABORATORIO TASC   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85025468064     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/s41598-017-06567-4     Document Type: Article

References (78)

1. Masini, G., Colace, L. & Assanto, G. Si based optoelectronics for communications. Mat. Sci. Eng. B 89, 2-9 (2002).
2. Silicon nanophotonics: basic principles, current status and perspectives (ed. Khriachtchev, L.) (Singapore, 2009).
3. Pavesi, L. & Lockwood, D. J. (eds). Silicon Photonics. (Berlin Heidelberg, 2004).
4. Sa'ar, A., Photoluminescence from silicon nanostructures: the mutual role of quantum confinement and surface chemistry. J. Nanophoton. 3, 032501-0332501-42 (2009).
5. Reed, G. & Kewell, A. Erbium-doped silicon and porous silicon for optoelectronics. Mater. Sci. Eng. B 40, 207-215 (1996).
6. Bondarenko, V. P. et al. Luminescence of erbium-doped porous silicon. Tech. Phys. Lett. 23, 3-4 (1997).
7. Marstein, E. S., Skjelnes, J. K. & Finstad, T. G. Incorporation of erbium in porous silicon. Phys. Scr. T101, 103-105 (2002).
8. Kenyon, A. J. Quantum confinement in rare-earth doped semiconductor systems. Curr. Opin. Solid State Mater. Sci. 7, 143-149 (2003).
9. Kenyon, A. J. Erbium in silicon. Semicond. Sci. Technol. 20, R65-R84 (2005).
10. Daldosso, N. & Pavesi, L. In Nanosilicon (ed. V. Kumar) 314-333 (Oxford, 2007).
11. 3+ doping conditions of planar porous silicon waveguides. Appl. Surf. Sci. 256, 581-586 (2009).
12. Namavar, F. et al. Strong room-temperature infrared emission from Er-implanted porous Si. J. Appl. Phys. 77, 4813-4815 (1995).
13. Castagna, M. et al. High efficiency light emitting devices in silicon. Mater. Sci. Eng. B 105, 83-90 (2003).
14. 3+) in a porous silicon matrix. Thin Sol. Films 562, 462-466 (2014).
15. Chan, S. & Fauchet, P. M. Tunable, narrow, and directional luminescence from porous silicon light emitting devices. Appl. Phys. Lett. 75, 274-276 (1999).
16. Lopez, H. A. & Fauchet, P. M. Infrared LEDs and microcavities based on erbium-doped silicon nanocomposites. Mat. Sci. Eng. B 81, 91-96 (2001).
17. Goff, D. R. Fiber Optic Reference Guide (eds. Hansen, K., Stull, M. K.) (Burlington, 2002).
18. 2 microspheres. J. Non-Cryst. Sol. 402, 244-251 (2014).
19. 3+ in crystalline silicon. Appl. Phys. Lett. 70, 1721-1723 (1997).
20. 3+ implanted in Si. Appl. Phys. Lett. 61, 2181-2183 (1992).
21. Luo, L. et al. Strong near-infrared photoluminescence in erbium/ytterbium codoped porous silicon. Appl. Phys. Lett. 86, 212505-212505-3 (2005).
22. Najar, A., Charrier, J., Lorrain, N., Haji, L. & Oueslati, M. Optical gain measurements in porous silicon planar waveguides codoped by erbium and ytterbium ions at 1.53μm. Appl. Phys. Lett. 91, 121120-121120-3 (2007).
23. Pavesi, L., Dal Negro, L., Mazzoleni, C., Franzò, G. & Priolo, F. Optical gain in silicon nanocrystals. Nature 408, 440-444 (2000).
24. Towards the First Silicon Laser (eds Pavesi, L., Gaponenko, S., Dal Negro, L.) Vol. 93 (Netherlands, 2003).
25. Prtljaga, N. et al. Limit to the erbium ions emission in silicon-rich oxide films by erbium ion clustering. Opt. Mater. Express 2, 1278-1285 (2012).
26. Miritello, M. et al. Er doped-Si nanostructures coupled with photonic crystals for high enhancement of light extraction. ECS Transactions 53, 71-80 (2013).
27. Talbot, E. et al. Nanoscale evidence of erbium clustering in Er-doped silicon-rich silica. Nanoscale res. lett. 8(1), 1-8 (2013).
28. Tengattini, A. et al. Toward a 1.54 m electrically driven erbium-doped silicon slot waveguide and optical amplifier. J. Lightwave Technol. 31(3), 391-397 (2013).
29. Ramírez, J. M. et al. Er-doped light emitting slot waveguides monolithically integrated in a silicon photonic chip. Nanotechnology 24(11), 115202 (2013).
30. Priolo, F., Gregorkiewicz, T., Galli, M. & Krauss, T. F. Silicon nanostructures for photonics and photovoltaics. Nat. Nanotechnol. 9(1), 19-32 (2014).
31. 3+ luminescent efficiency in Er-doped SiO x films containing amorphous Si nanodots. J. Alloy Compd. 676, 428-431 (2016).
32. 3+ in erbium-doped silicon-rich oxide films. Nanoscale Res. Lett. 8(1), 1-6 (2013).
33. 3+ in different silicon oxide and silicon nitride environments. J. Appl. Phys. 116(12), 123104 (2014).
34. Rebohle, L. et al. Rare earth doped metal-oxide-semiconductor structures: a promising material system or a dead end of optoelectronic evolution? ECS Transactions 61(5), 175-185 (2014).
35. Mula, G. et al. Controlling the Er content of porous silicon using the doping current intensity. Nanoscale Res. Lett. 9, 332-332-7 (2014).
36. Mula, G., Setzu, S., Manunza, G., Ruffilli, R. & Falqui, A. Characterization of Er in Porous Si. Nanoscale Res. Lett. 7, 376-376-9 (2012).
37. Mula, G. et al. Electrochemical doping of mesoporous silicon with Er: the effect of the current intensity. Appl. Surf. Sci. 311, 252-257 (2014).
38. Mula, G., Setzu, S., Manunza, G., Ruffilli, R. & Falqui, A. Optical, electrochemical and structural properties of Er-doped porous silicon. J. Phys. Chem. C 116, 11256-11260 (2012).
39. Petrovich, V. et al. Deposition of erbium containing film in porous silicon from ethanol solution of erbium salt. J. Porous Mat. 7, 37-40 (2000).
40. Korotcenkov, G. & Cho, B. Porous Silicon Processing, Porous Silicon From Formation to Application - Formation and Properties, (ed. Korotcenkov, G.) 331 (Taylor & Francis Group, 2016).
41. Lopez, H. A. & Fauchet, P. M. 1.54 μm electroluminescence from erbium-doped porous silicon composites for photonic applications. Phys. Stat. Sol. A 182, 413-418 (2000).
42. 3 films grown by magnetron sputtering. J. Appl. Phys. 100, 013502 (2006).
43. Miritello, M. et al. Efficient luminescence and energy transfer in erbium silicate thin films. Adv. Mater. 19, 1582-1588 (2007).
44. Bals, S., Van Aert, S. & Van Tendeloo, G. High resolution electron tomography. Curr. Opin. Solid St. M. 17, 107-114 (2013).
45. Weyland, M. & Midgley, P. A. Electron tomography. Mater. Today 7, 32-40 (2004).
46. Möbus, G. & Inkson, B. J. Nanoscale tomography in materials science. Mater. Today 10, 18-25 (2007).
47. Ersen, O., Florea, I., Hirlimann, C. & Pham-Huu, C. Exploring nanomaterials with 3D electron microscopy. Mater. Today 18, 395-408 (2015).
48. Kenyon, A. J. Recent developments in rare-earth doped materials for optoelectronics. Prog. Quant. Electron. 26, 225-284 (2002).
49. Towards the First Silicon Laser (eds. Pavesi, L., Gaponenko, S., Dal Negro, L.) (Dordrecht, 2003).
50. Bettotti, P. et al. Silicon nanostructures for photonics. J. Phys. Condens. Matter 14, 8253-8281 (2002).
51. Pavesi, L. Will silicon be the photonic material of the third millenium? J. Phys. Condens. Matter 15, R1169-R1196 (2003).
52. Golovan, L. A. & Timoshenko, V. Y. Nonlinear-optical properties of porous silicon nanostructures. J. Nanoelectron. Optoe. 8, 223-239 (2013).
53. 3+ Doping conditions of planar porous silicon waveguides. Appl. Surf. Sci. 256(3), 581-586 (2009).
54. Polman, A. et al. Erbium in crystal silicon: optical activation, excitation, and concentration limits. J. Appl. Phys. 77, 1256-1262 (1994).
55. Polman, A. Erbium implanted thin film photonic materials. J. Appl. Phys. 82, 1-39 (1997).
56. Zhou, Y., Snow, P. & Russell, P. S. J. Strong modification of photoluminescence in erbium-doped porous silicon microcavities. Appl. Phys. Lett. 77, 2440-2442 (2000).
57. Salonen, J., Mäkilä, E., Riikonen, J., Heikkilä, T. & Lehto, V. P. Controlled enlargement of pores by annealing of porous silicon. Phys. Status Solidi A 206, 1313-1317 (2009).
58. Goldstein, J., et al. Scanning Electron Microscopy and X-Ray Microanalysis (New York, 2003).
59. Rumpf, K., Granitzer, P., Poelt, P. & Reissner, M. Specific loading of porous silicon with iron oxide nanoparticles to achieve different blocking temperatures. Thin Solid Films 543, 56-58 (2013).
60. Rumpf, K., Granitzer, P., Hilscher, G., Albu, M. & Poelt, P. Magnetically interacting low dimensional Ni-nanostructures within porous silicon. Microelectron. Eng. 90, 83-87 (2012).
61. D'Acapito, F. et al. Structure of Er-O complexes in crystalline Si. Phys. Rev. B 69, 153310 (2004).
62. 3 glassy films studied by EXAFS. J. Non-Cryst. Solids 293, 118-124 (2001).
63. Terrasi, A. et al. Evolution of the local environment around Er upon thermal annealing in Er and O Co-implanted Si. Appl. Phys. Lett. 70, 1712-1714 (1997).
64. 3+ luminescence in silicon-rich silicon oxide thin films. J. Appl. Phys. 102, 103516 (2007).
65. 2. Phys. Rev. B 74, 205428 (2006).
66. Piamonteze, C., Iñiguez, A. C., Tessler, L. R., Martins Alves, M. C. & Tolentino, H. Environment of erbium in a-Si:H and a-SiO x: H. Phys. Rev. Lett. 81, 4652-4655 (1998).
67. Smolin, Y. I. & Shepelev, Y. F. The crystal structures of rare earth pyrosilicates. Acta Cryst. B26, 484-492 (1970).
68. Setzu, S. et al. Porous silicon-based potentiometric biosensor for triglycerides. Phys. Stat. Sol. 204(5), 1434-1438 (2007).
69. Anderson, C. A. & Hasler, M. F. Extension of Electron Microprobe Techniques to Biochemistry by the Use of Long Wavelength X-Rays (eds. Castaing, R., Deschamps, P., Philibert, J.) (Paris, 1966).
70. 3+ environments in Mg-based nanoparticle-doped optical fibre preforms. J. Non-Cryst. Solids 401, 50-53 (2014).
71. Pascarelli, S. et al. X-ray optics of a dynamical sagittal-focusing monochromator on the GILDA beamline at the ESRF. J. Synch. Rad. 3, 147-155 (1996).
72. Ravel, B. & Newville, M. Data analysis for X-ray absorption spectroscopy using IFEFFIT. J. Synchrotron. Rad. 12, 537-541 (2005).
73. Zabinsky, S. I., Rehr, J. J., Ankudinov, A., Albers, R. C. & Eller, M. J. Multiple scattering calculations of X-ray absorption spectra. Phys. Rev. B 52, 2995-3009 (1995).
74. Midgley, P. A. & Weyland, M. 3D electron microscopy in the physical sciences: the development of Z-contrast and EFTEM tomography. Ultramicroscopy 96, 413-431 (2003).
75. Bleuet, P. et al. Specifications for hard condensed matter specimens for three-dimensional high-resolution tomographies. Microsc. Microanal. 19, 726-739 (2013).
76. Chen, D. et al. The properties of SIRT, TVM, and DART for 3D imaging of tubular domains in nanocomposite thin-films and sections. Ultramicroscopy 147, 137-148 (2014).
77. Printemps, T. et al. Self-adapting denoising, alignment and reconstruction in electron tomography in materials science. Ultramicroscopy 160, 23-34 (2016).
78. Printemps, T., Bernier, N., Bleuet, P., Mula, G. & Hervé, L. Non-rigid alignment in electron tomography in materials science. J. Microscopy 263, 312-319 (2016).