Optical and structural properties of Er2O3 films grown by magnetron sputtering

Journal of Applied Physics

Volumn 100, Issue 1, 2006, Pages

  Miritello, M ^a   Lo Savio, R ^a   Piro, A M ^a   Franzo G ^a   Priolo, F ^a   Iacona, F ^b   Bongiorno, C ^b  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ERBIUM COMPOUNDS; FILM GROWTH; MAGNETRON SPUTTERING; MORPHOLOGY; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; REACTION KINETICS; SILICON; SUBSTRATES;

PHOTON EMISSIONS; RARE EARTH OXIDES; SILICATE-LIKE PHASES; SILICON SUBSTRATES;

THIN FILMS;

EID: 33746216150     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2208906     Document Type: Article

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