Evolution of the local environment around Er upon thermal annealing in Er and O co-implanted Si

Applied Physics Letters

Volumn 70, Issue 13, 1997, Pages 1712-1714

  Terrasi, A ^a   Franzo G ^a   Coffa, S ^a   Priolo, F ^b   D'Acapito, F ^a,d   Mobilio, S ^c  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

^c ROMA TRE UNIVERSITY   (Italy)

^d EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008815914     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118678     Document Type: Article

References (13)

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