Atomic physics of highly charged ions and the case for SN as a source material

EUV Sources for Lithography

Volumn , Issue , 2006, Pages 149-173

  O'Sullivan, Gerry ^a   Cummings, Anthony ^a   Dunne, Padraig ^a   Hayden, Patrick ^a   McKinney, Luke ^a   Murphy, Nicola ^a   White, John ^a  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

HIGHLY CHARGED IONS; SOURCE MATERIAL;

ATOMIC PHYSICS;

EID: 84960216777     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1117/3.613774.Ch5     Document Type: Chapter

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