|
Volumn 28, Issue 16, 2003, Pages 1478-1480
|
High-resolution spectrum of xenon ions at 13.4 nm
|
Author keywords
[No Author keywords available]
|
Indexed keywords
EXTRAPOLATION;
INDUCTANCE;
LITHOGRAPHY;
OPTICAL RESOLVING POWER;
SPECTRUM ANALYSIS;
ULTRAVIOLET RADIATION;
XENON;
ENERGY PARAMETERS;
POSITIVE IONS;
|
EID: 0042427648
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.28.001478 Document Type: Article |
Times cited : (54)
|
References (17)
|