Strong extreme ultraviolet emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser

Optics Communications

Volumn 184, Issue 1, 2000, Pages 161-167

  Fiedorowicz, Henryk ^a   Bartnik, Andrzej ^a   Daido, Hiroyuki ^b   Choi, Il Woo ^b   Suzuki, Masayuki ^b   Yamagami, Susumu ^b  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM; LASER PRODUCED PLASMAS; NEODYMIUM LASERS; ULTRAVIOLET RADIATION; XENON;

GAS PUFF TARGETS;

PHOTOLITHOGRAPHY;

EID: 0034298740     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(00)00946-9     Document Type: Article

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