Absorption of EUV in laser plasmas generated on xenon gas jets

Journal of Quantitative Spectroscopy and Radiative Transfer

Volumn 81, Issue 1-4, 2003, Pages 97-105

  de Bruijn, René ^a   Koshelev, Konstantin ^a,b   Kooijman, Gerben ^a   Toma, Elena Simona ^a   Bijkerk, Fred ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b INSTITUTE OF SPECTROSCOPY   (Russian Federation)

Author keywords

EUV; Gas jet; Laser produced plasma; Xenon

Indexed keywords

DENSITY OF GASES; EXTREME ULTRAVIOLET LITHOGRAPHY; GAS ABSORPTION; LASER BEAMS; LASER PRODUCED PLASMAS; LIGHT SOURCES; PLASMA INTERACTIONS; SPECTRUM ANALYSIS; ABSORPTION; SPECTROGRAPHS; ULTRAVIOLET RADIATION; XENON;

EUV SOURCE; GAS JET; LASER PLASMA; LOW-DENSITY TARGET; TARGET GAS; TRANSMISSION GRATING SPECTROGRAPH;

XENON; LASER PRODUCED PLASMAS;

GAS JETS;

LASER;

EID: 0043068161     PISSN: 00224073     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-4073(03)00063-3     Document Type: Article

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