On the dynamics of a micro-gripper subjected to electrostatic and piezoelectric excitations

International Journal of Non-Linear Mechanics

Volumn 77, Issue , 2015, Pages 183-192

  Rezaei Kivi, Araz ^a   Azizi, Saber ^b  

^a IRAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Iran)

^b URMIA UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

Clamped clamped microbeam; Method of multiple scales; Micro gripper; Pull in voltage

Indexed keywords

CRYSTALLOGRAPHY; DENSITY (SPECIFIC GRAVITY); ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; ELECTROSTATICS; EQUATIONS OF MOTION; FERROELECTRIC CERAMICS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS;

FUNCTIONALLY GRADED PIEZOELECTRIC; GEOMETRICAL NON-LINEARITY; LEAD ZIRCONATE TITANATE; METHOD OF MULTIPLE SCALE; MICRO BEAMS; MICRO GRIPPER; PIEZOELECTRIC EXCITATION; PULL-IN VOLTAGE;

GRIPPERS;

EID: 84941132146     PISSN: 00207462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijnonlinmec.2015.07.012     Document Type: Article

References (51)

1. Y. Jia, and Q. Xu MEMS micro-gripper actuator and sensors: the state-of-the-art survey Recent Pat. Mech. Eng. 6 2 2013 132 142
2. E.V. Bordatchev, S.K. Nikumb, Micro-gripper: design, finite element analysis and laser micro fabrication, in: Proceedings of the International conference on MEMS, Nano and Smart Systems, IEEE, 2003, pp. 308-313.
3. S.H. Lee, K.C. Lee, S.S. Lee, H.S. Oh, Fabrication of an electrothermally actuated electrostatic micro-gripper, in: Proceedings of the 12th International Conference on TRANSDUCER, Solid-State Sensors, Actuators and Microsystems, IEEE, 1, 2003, pp. 552-555.
4. H.Y. Chan,W.J. Li, A thermally actuated polymer micro robotic gripper for manipulation of biological cells, in: Proceedings of the International Conference on Robotics and Automation, IEEE, 1, 2003, pp. 288-293.
5. C.S. Pan, and W.Y. Hsu An electro-thermally and laterally driven polysilicon microactuator J. Micromech. Microeng. 7 1996 7 13
6. E.V. Bordatchev, S.K. Nikumb, W. Hsu, Fabrication of long-stretch microdrive for MEMS applications by ultra precision laser micromachining, Canada and Taiwan Joint Workshop on Advanced Manufacturing Technologies, 2002.
7. C.P. Hsu, W.C. Tai, W. Hsu, Design and analysis of an electrothermally driven long-stretch micro drive with cascaded structure, in: Proceedings of the International Mechanical Engineering Congress and Exposition Microelectromechanical systems, ASME, 2002, pp. 235-240.
8. C.D. Lott, T.W. McLain, J.N. Harb, and L.L. Howell Modeling the thermal behaviour of a surface-micromahined linear-displacement thermomechanical microactuator Sens. Actuators A 101 1-2 2002 239 250
9. P.B. Chu, K.S.J. Pister, Analysis of closed-loop control of parallel-plate electrostatic micro-grippers, in: Proceedings of the International Conferences on Robotics and Automation, IEEE, 1, 1994, pp. 820-825.
10. B.E. Volland, H. Heerlein, and I.W. Rangelow Electrostatically driven micro-gripper Microelectron. Eng. 61-62 2002 1015 1023
11. C.J. Kim, A.P. Pisano, R.S. Muller, Overhung electrostatic micro-gripper, in: Proceedings of the International Conference on Solid-State Sensors and Actuators, IEEE, 1991, pp. 610-613.
12. C.J. Kim, A.P. Pisano, and R.S. Muller Silicon-processed overhanging micro-gripper J. Microelectromech. Syst. IEEE 1 1 1992 31 36
13. C.J. Kim, A.P. Pisano, R.S. Muller, and M.G. Lim Polysilicon micro-gripper Sens. Actuators A 33 3 1990 221 227
14. P. Boggild, T.M. Hansen, K. Molhave, A. Hyldgrad, M.O. Jensen, J. Richter, L. Montelius, F. Grey, Customizable nanotweezers for manipulation of freestanding nanostructures, in: Proceedings of the 1st IEEE Conference on Nanotechnology, IEEE, 2001, pp. 87-92.
15. Y. Haddab, N. Challet, A. Bourjault, A micro-gripper using smart piezoelectric actuators, Intelligent Robots and Systems, IEEE, 1. 2000, pp. 659-664.
16. M.C. Carrozza, A. Menciassi, G. Tiezzi, and P. Dario The development of a LIGA-microfabricated gripper for micromanipulation tasks J. Micromech. Microeng. 8 2 1997 141 143
17. H. Ren, and E. Gerhard Design and fabrication of a current-pulse-excited bistable magnetic microactuator Sens. Actuators A 58 3 1997 259 264
18. Z.W. Zhong, and C.K. Yeong Development of a gripper using SMAwire Sens. Actuators A 126 2 2006 375 381
19. A.P. Lee, D.R. Ciarlo, P.A. Krulevitch, S. Lehew, J. Trevino, M.A. Northrup, A practical micro-gripper by fine alignment, eutectic bonding and SMA actuation, in: Proceedings of the 8th Conference on Solid-State Sensors and Actuators, 2, 1995, pp. 368-371.
20. M. Kohl, E. Just, W. Pfleging, and S. Miyazaki SMA micro-gripper with integrated antagonism Sens. Actuators A 83 1-3 2000 208 213
21. S. Butefisch, V. Seidemann, and S. Buttgenbach Novel micro-pneumatic actuator for MEMS Sens. Actuators A 97-98 2002 638 645
22. L. Miao, Z. Dong, H. Chan, Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method, in: Proceedings of the 5th World Conference on Intelligent Control and Automatioin, IEEE, 5, 2004, pp. 3800-3804
23. C. Rembe, R. Kant, R.S. Muller, Optical measurement methods to study dynamic behavior in MEMS, Conference on Microsystem Engineering: Metrology and Inspection, 2001.
24. S.K. Nayar, and Y. NaKagawa Shape from focus IEEE Trans. Pattern Anal. Mach. Intell. 16 8 1994 824 831
25. G. Greitmann, and R.A. Buser Tactile micro-gripper for automated handling of microparts Sens. Actuators A 53 1-3 1996 410 415
26. K. Molhave, and O. Hansen Electro-thermally actuated micro-grippers with integrated force-feedback J. Micromech. Microeng. 15 6 2005 1256 1270
27. T. Chu Duc, G.K. Lau, J.F. Creemer, and P.M. Sarro Electrothermal micro-gripper with large jaw displacement and integrated force sensors J. Microelectromech. Syst. 17 6 2008 1546 1555
28. T. Chu Duc, G.K. Lau, J.F. Creemer, and P.M. Sarro Polymeric thermal microactuator with emebedded silicon skeleton: Part II - fabrication, characterization, and application for 2-DOF micro-gripper J. Microelectromech. Syst. 17 4 2008 823 831
29. T. Chu Duc, J.F. Creemer, and P.M. Sarro Piezoresistive cantilever beam for force sensing in two dimensions IEEE Sens. J. 7 1 2007 96 104
30. G. Greitmann, and R.A. Buser Tactile microgripper for automated handling of microparts Sens. Actuators A 53 1-3 1996 410 415
31. Y. Sun, B.J. Nelson, D.P. Potasek, and E. Enikov A bulk microfabricated multi-axis capacitive cellular force sensor using transverse com drives J. Micromech. Microeng. 12 6 2002 832 840
32. Y. Sun, S.N. Fry, D.P. DP, D.J. Bell, and B.J. Nelson Characterizing fruit fly flight behavior using a microforce sensor with a new comb drive configuration J. Microelectromech. Syst. 14 1 2005 4 11
33. H. Mobki, G. Rezazadeh, M. Sadeghi, F.V. Tahami, and M.M.S. Fakhrabadi A comprehensive study of stability in an electrostatically actuated micro-beam Int. J. Non-linear Mech. 48 2003 78 85
34. H.M. Ouakad, and M.I. Younis The dynamic behavior of MEMS arch resonators actuated electrically Int. J. Non-Linear Mech. 45 7 2010 704 713
35. M.I. Younis, F. Asaleem, and D. Jordy The response of clamped-clamped microbeams under mechanical shock Int. J. Non-Linear Mech. 42 4 2007 643 657
36. D. Piyabongkam, D. Sun, D. Rajamani, and A. Sezen Travel range extension of a MEMS electrostatic actuators IEEE Trans. Control Syst. Technol. 13 1 2005 138 145
37. P.B. Chu, K.S.J. Pister, Analysis of closed loop control of parallel-plate electrostatic micro-gripper, in: Proceedings of the International Conference on Robotics and Automation, IEEE, 1, 1994, pp. 820-825.
38. O. Millet, P. Bernardoni, S. Régnier, P. Bidaud, E. Tsitsiris, D. Collard, and L. Buchaillot Electrostatic actuated micro gripper using an amplification mechanism Sens. Actuators A 114 2-3 2004 371 378
39. T. Sahai, R.B. Bhiladvala, and A.T. Zehnder Thermomechanical transition in doubly-clamped micro-oscillators Int. J. Non-Linear Mech. 42 2007 596 607
40. W.M. Zhang, and G. Meng Nonlinear dynamic analysis of electrostatically actuated resonant MEMS sensors under parametric excitation IEEE Sens. J. 7 3 2007 370 380
41. A. Delnavaz, S.N. Mahmoodi, N. Jalili, and H. Zohoor Linear and non-linear vibration and frequency response analyses of micro-cantilever subjected to tip sample iteration Int. J. Non-Linear Mech. 45 2010 176 185
42. H. Li, B. Piekarski, D.L. De Voe, and B. Balachandran Nonlinear oscillation of piezoelectric micro resonators with curved cross-section Sens. Actuators A 144 1 2008 194 200
43. R. Jahanghiri, R. Yahyazadeh, N. Sharafkhani, and V.A. Maleki Stability analysis of FGM micro-gripper subjected to nonlinear electrostatic and temperature variation loading Sci. Eng. Compos. Mater. 2014
44. S. Azizi, M.R. Ghazavi, S.E. Khadem, J. Yang, and G. Rezazadeh Stability analysis of a parametrically excited functionally graded piezoelectric, MEMS system Curr. Appl. Phys. 12 2 2012 456 466
45. A.S. Vahdat, and G. Rezazadeh Effects of axial and residual stresses on thermoelastic damping in capacitive microbeam resonators J. Frankl. Inst. 348 4 2011 622 639
46. S. Azizi, M.R. Ghazavi, S.E. Khadem, G. Rezazadeh, and C. Cetinkaya Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam Nonlinear Dyn. 73 1-2 2013 853 867
47. S. Azizi, G. Rezazadeh, M.R. Ghazavi, and S.E. Khadem Parametric excitation of a piezoelectrically actuated system near Hopf bifurcation Appl. Math. Model. 36 4 2012 1529 1549
48. S. Azizi, M.R. Ghazavi, S.E. Khadem, I. Ahmadian, and C. Cetinkaya Tuning the primary resonance of a micro resonator, using piezoelectric actuation Nonlinear Dyn. 76 1 2014 839 852
49. M. Boudaoud, Y. Haddab, Y.L. Gorrec, Modeling of a MEMS-based micro-gripper: application to dexterous micromanipulation, in: Proceedings of the International Conference on Intelligent Robots and Systems, IEEE, 2010, pp. 5634-5639.
50. A.H. Nayfeh, and B. Balachandran Applied Nonlinear Dynamics: Analytical Computational, and Experimental Methods 1995 Wiley New York
51. S.H. Strogatz Nonlinear Dynamic and Chaos with Application to Physics, Biology, Chemistry and Engineering 1994 Westview Press