Fabrication of an electrothermally actuated electrostatic microgripper

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 552-555

  Lee, S H ^a   Lee, Kwang Cheol ^a   Lee, S S ^a   Oh, Hyeon Seok ^b  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

Adhesives; Electrodes; Electrostatic actuators; Electrothermal effects; Fabrication; Gravity; Grippers; Piezoelectric actuators; Probes; Shape

Indexed keywords

ACTUATORS; ADHESIVES; ELECTRIC FIELDS; ELECTRIC HEATING; ELECTRODES; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; ELECTROSTATICS; FABRICATION; GRAVITATION; GRIPPERS; MICROSYSTEMS; PROBES; SAFE HANDLING; SILICON WAFERS; SOLID-STATE SENSORS; TRANSDUCERS;

ELECTRO-THERMAL ACTUATORS; ELECTRO-THERMAL EFFECTS; ELECTROTHERMAL ACTUATION; INNER-ELECTRODES; MICRO-OBJECTS; MICROGRIPPER; OBJECT HANDLING; SHAPE;

PIEZOELECTRIC ACTUATORS;

EID: 84944734850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215376     Document Type: Conference Paper

References (15)

1. A. Desai, S.-W. Lee, and Y.-C. Tai, "A MEMS Electrostatic Particle Transportation System," Sensors and Actuators, Vol. 73, 1999,pp. 37-44
2. C.-J. Kim, A. P. Pisano, R. S. Muller, and M. G. Lim, "Polysilicon Microgripper," in Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, 1990, pp. 48-51
3. P. Bøggild, T. M. Hansen, K. Mølhave, A. Hyldgård, M. O. Jensen, J. Richter, L. Montelius, and F. Grey, "Customizable Nanotweezers for Manipulation of Free-standing Nanostructures," IEEE-Nano, 2001, pp. 87-92
4. C. G. Keller, and R. T. Howe, "HEXSIL Tweezwers for Teleoperated Microassembly", MEMS '97, 1997, pp. 72-77
5. Y. Suzuki, "Flexible Microgripper and its Application to Micromeasurement of Mechanical and Thermal Properties," MEMS '96, 1996, pp. 406-411
6. S. Basrour, L. Robert, S. Ballandras, and D. Hauden, "Mechanical Characterization of Microgrippers Realized by LIGA Technique," Transducers '97, 1997, pp. 599-602
7. A. P. Lee, D. R. Ciarlo, P. A. Krulevitch, S. Lehew, J. Trevino, and M. Allen Northrup, "A Practical Microgripper by Fine Alignment, Eutectic Bonding and SMA Actuation," Transducers '95, 1995, pp. 368-371
8. I. Roch, Ph. Bidaud, D. Collard, and L. Buchaillot, "Fabrication and Characterization of an SU-8 Gripper Actuated by a Shape Memory Alloy Thin Film," J. Micromech. Microeng., Vol. 13, 2003, pp. 330-336
9. F. Arai, and T. Fukuda, "Adhesion-type Micro Endeffector for Micromanipulation," Proc. IEEE International Conference on Robotics and Automation, 1997, pp. 1472-1477
10. K. Koyano, and T. Sato, "Micro Object Handling System with Concentrated Visual Fields and New Handling Skills," Proc. IEEE International Conference on Robotics and Automation, 1996, pp. 2541-2548
11. J. T. Feddema, P. Xavier, and R. Brown, "Micro-Assembly Planning with van der Waals Force," Proc. IEEE International Symposium on Assembly and Task Planning, 1999, pp. 32-38
12. S. Saito, H. Miyazaki, and T, Sato, "Pick and Place Operation of a Micro Object with High Reliability and Precision based on Micro Physics under SEM," Proc. IEEE International Conference on Robotics and Automation, 1999, pp. 2736-2743
13. F. Arai, D. Andou, and T. Fukuda, "Adhesion Forces Reduction for Micro Manipulation based on Micro Physics," MEMS '96, 1996, pp. 354-359
14. H.-S. Oh, "Elektrostatische Greifer für die Mikromontage," Ph. D. Thesis, Technische Universität Braunschweig, 1998
15. R. S. Fearing, "Survey of Sticking Effects for Micro Parts Handling," Intelligent Robots and Systems '95, Vol. 2, 1995, pp. 212-217