Thermomechanical transitions in doubly-clamped micro-oscillators

International Journal of Non-Linear Mechanics

Volumn 42, Issue 4, 2007, Pages 596-607

  Sahai, Tuhin ^a   Bhiladvala, Rustom B ^a,b   Zehnder, Alan T ^a  

^a Department of Obstetrics Gynecology   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

Bifurcation; Experimental; Hardening; MEMS; Micromechanical resonators; Non linear dynamics; Non linear vibrations; Optical detection; Softening

Indexed keywords

LASER BEAMS; MICROMECHANICS; MICROSTRUCTURE; OPTICAL DEVICES; THERMOMECHANICAL TREATMENT;

MICRO OSCILLATORS; NON LINEAR DYNAMICS; OPTICAL DETECTION;

MEMS;

EID: 34249865888     PISSN: 00207462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijnonlinmec.2006.12.009     Document Type: Article

References (30)

1. Ekinci K.L., Huang X.M.H., and Roukes M.L. Ultrasensitive nanoelectromechanical mass detection. Appl. Phys. Lett. 84 22 (2004) 223-256
2. Ilic B., Craighead H.G., Czaplewski D., Neuzil P., Campagnolo C., and Batt C. Mechanical resonant immunospecific biological detector. Appl. Phys. Lett. 77 (2000) 450-452
3. Blom M.T., Chmela E., van der Heyden F.H.J., Ooterbroek R.E., Tijssen R., Elwenspoek M., and van den Berg A. A differential viscosity detector for use in miniturized chemical separation systems. J. Microelectromechanical Syst. 14 1 (2005) 70-80
4. Lee S., Demirci M.U., and Nguyen C.T.C. A 10-MHz micromechanical resonator Pierce reference oscillator for communications. Digest of Technical Papers, the 11th International Conference on Solid-State Sensors and Actuators (Transducers 01) (2001) 1094-1097
5. Reichenbach R.B., Zalalutdinov M., Aubin K.L., Rand R., Houston B., Parpia J.M., and Craighead H.G. 3rd order intermodulation in a micromechanical thermal mixer. J. Microelectromechanical Syst. 14 6 (2005) 1244-1252
6. Hoppensteadt F.C., and Izhikevich E.M. Synchronization of MEMS resonators and mechanical neurocomputing. IEEE Trans. Circuits Systems 48 2 (2001) 133-138
7. Segall D.E., Ismail-Beigi S., and Arias T.A. Elasticity of nanometer-sized objects. Phys. Rev. B 65 21 (2002) 214109
8. Zhao X., Dankowicz H., Reddy C.K., and Nayfeh A.H. Modeling and simulation methodology for impact microactuators. J. Micromechanics Microengineering 14 (2004) 775-784
9. Rützel S., Lee S.I., and Raman A. Nonlinear dynamics of atomic-force-microscope probes driven in Lennard-Jones potentials. Proc. R. S. London. Ser. A 459 2036 (2003) 1925-1948
10. Aubin K., Zalalutdinov M., Alan T., Reichenbach R., Rand R., Zehnder A., Parpia J., and Craighead H. Limit cycle oscillations in CW laser driven NEMS. J. Microelectromechanical Syst. 13 6 (2004) 1018-1026
11. Younis M.L., and Nayfeh A.H. A study of the nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31 (2003) 91-117
12. Turner K.L., Miller S.A., Hartwell P.G., MacDonald N.C., Strogatz S.H., and Adams S.G. Five parametric resonances in a microelectromechanical system. Nature 396 (1998) 149-152
13. Turner K.L., Baskaran R., and Zhang W. Using nonlinear dynamics for performance enhancement in resonant micro and nano-scale devices. Proceedings of the 42nd IEEE Conference on Decision and Control (2003) 2650-2651
14. Carr D.W., Evoy S., Sekaric L., Craighead H.G., and Parpia J.M. Measurement of mechanical resonance and losses in nanometer scale silicon wires. Appl. Phys. Lett. 75 7 (1999) 920-922
15. Zalalutdinov M., Parpia J., Aubin K., Craighead H., Alan T., Zehnder A., and Rand R. Hopf bifurcation in a disk-shaped NEMS. Proceeding of DETC 2003 ASME Design Engineering Technical Conferences (September 2003)
16. R. Rand, Lecture Notes on Nonlinear Vibrations, Cornell University, available at 〈http://www.tam.cornell.edu/randdocs/〉, 2003.
17. Rhoads J.F., Shaw S.W., Turner K.L., Moehlis J., DeMartini B.E., and Zhang W. Generalized parametric resonance in electrostatically actuated microelectromechanical oscillators. J. Sound Vib. 296 (2006) 797-829
18. Hecht E. Optics. second ed. (1987), Addison-Wesley, Reading, MA
19. Ravindra N.M., Abedrabbo S., Chen W., Tong F.M., Nanda A.K., and Speranza A.C. Temperature-dependent emissivity of silicon-related materials and structures. IEEE Trans. Semicond. Manuf. 11 1 (1998) 30-39
20. Hibbitt H.D., Karlsson B.I., and Sorensen E.P. ABAQUS user manual (2002), Hibbitt, Karlson and Sorensen Inc.
21. Zink B.L., and Hellman F. Specific heat and thermal conductivity of low-stress amorphous Si-N membranes. Solid State Commun. 129 (2004) 199-204
22. Mastrangelo C.H., Tai Y.-C., and Muller R.S. Thermophysical properties of low-residual stress, silicon-rich, LPCVD silicon nitride films. Sensors Actuators 23 (1990) 856-860
23. Malvern L.E. Introduction to the Mechanics of a Continuous Medium (1969), Prentice-Hall, Englewood Cliffs, NJ
24. Frisch-Ray R. Flexible Bars (1962), Butterworths, London
25. Doedel E.J., Keller H.B., and Kernevez J.P. Numerical analysis and control of bifurcation problems, part I. Int. J. Bifurcation Chaos 1 3 (1991) 493-520
26. Doedel E.J., Keller H.B., and Kernevez J.P. Numerical analysis and control of bifurcation problems, part II. Int. J. Bifurcation Chaos 1 4 (1991) 745-772
27. Alexander J.C., Doedel E.J., and Othmer H.G. On the resonance structure in a forced excitable system. SIAM J. Appl. Math. 50 5 (1990) 1373-1418
28. Munkres J.R. Topology. second ed. (2000), Prentice-Hall, Englewood Cliffs, NJ
29. Guckenheimer J., and Holmes P. Nonlinear Oscillations, Dynamical Systems and Bifurcations of Vector Fields (1996), Springer, New York
30. Schilder F., Osinga H.M., and Vogt W. Continuation of quasi-periodic invariant tori. SIAM J. Appl. Dynamical Syst. 4 3 (2005) 459-488