A comprehensive study of stability in an electro-statically actuated micro-beam

International Journal of Non-Linear Mechanics

Volumn 48, Issue , 2013, Pages 78-85

  Mobki, Hamed ^a   Rezazadeh, Ghader ^b   Sadeghi, Morteza ^a   Vakili Tahami, Farid ^a   Seyyed Fakhrabadi, Mir Masoud ^c  

^a UNIVERSITY OF TABRIZ   (Iran)

^b URMIA UNIVERSITY   (Iran)

^c UNIVERSITY OF TEHRAN   (Iran)

Author keywords

MEMS; Pitch fork bifurcation; Pull in voltage; Saddle node bifurcation

Indexed keywords

APPLIED VOLTAGES; BIFURCATION BEHAVIOR; BOUNDED AND UNBOUNDED SOLUTIONS; COMPREHENSIVE STUDIES; CONDUCTIVE PLATES; CRITICAL VALUE; DYNAMIC MOTIONS; EQUILIBRIUM POSITIONS; EULER BERNOULLI BEAMS; FIXED POINTS; GALERKIN WEIGHTED RESIDUAL METHOD; GLOBAL STABILITY; HETEROCLINIC ORBIT; HOMOCLINIC; IN-PHASE; LINEARIZATION METHODS; MASS-SPRING MODELS; MICRO BEAMS; NON-LINEAR MOTIONS; PULL-IN VOLTAGE; QUALITATIVE CHANGES; RF RESONATORS; SADDLE NODE; SADDLE NODE BIFURCATION; STATIC DEFLECTIONS; VOLTAGE RATIOS;

EQUATIONS OF MOTION; MEMS;

BIFURCATION (MATHEMATICS);

EID: 84865984858     PISSN: 00207462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijnonlinmec.2012.08.002     Document Type: Article

References (26)

1. F. Khatami, and G. Rezazadeh Dynamic response of a torsional micromirror to electrostatic force and mechanical shock Microsystem Technologies 15 2009 535 545
2. S. Senturia Microsystem Design 2001 Kluwer Norwell, MA
3. H. Sadeghian, G. Rezazadeh, and P.M. Osterberg Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches Journal of Microelectromechanical Systems 16 6 2007 1334 1340 (Pubitemid 350239125)
4. M. Dequesnes, S.V. Rotkin, and N.R. Aluru Calculation of pull-in voltages for carbon-nanotube-based nanoelectromechanical switches Nanotechnology 13 2002 120 131 (Pubitemid 34180695)
5. P. Kim, and C.M. Lieber Nanotube nanotweezers Science 286 1999 2148 2150 (Pubitemid 129516287)
6. T. Rueckes, K. Kim, E. Joselevich, G.Y. Tseng, C.L. Cheung, and C.M. Lieber Carbon nanotube-based nonvolatile random access memory for molecular computing Science 289 2000 94 97 (Pubitemid 30463297)
7. N. Kacem, S. Baguet, S. Hentz, and R. Dufour Computional and quasi-analytical models for non-linear vibrations of resonant MEMS and NEMS sensors International Journal of Non-Linear Mechanics 46 2011 532 542
8. H.M. Ouakad, and M.I. Younis The dynamic behavior of MEMS arch resonators actuated electrically International Journal of Non-Linear Mechanics 45 2010 704 713
9. T. Sahai, R.B. Bhiladvala, and A.T. Zehnder Thermomechanical transition in doubly-clamped micro-oscillators International Journal of Non-Linear Mechanics 42 2007 596 607
10. A.H. Nayfeh, H.M. Ouakad, F. Najar, S. Choura, and E.M. Abdel-Rahman Nonlinear dynamics of a resonant gas sensor Nonlinear Dynamics 59 2010 607 618
11. W.H. Lin, and Y.P. Zhao Dynamic behavior of nanoscale electrostatic actuators Chinese Physics Letters 20 11 2003 2070 2073
12. G. Rezazadeh, A. Tahmasebi, and M. Zubstov Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage Microsystem Technologies 12 2006 1163 1170 (Pubitemid 44407110)
13. A. Delnavaz, S. Nima Mahmoodi, N. Jalili, and H. Zohoor Linear and non-linear vibration and frequency response analyses of micro-cantilever subjected to tip sample iteration International Journal of Non-Linear Mechanics 45 2010 176 185
14. Y. Zhang, and Y.P. Zhao Numerical and analytical study on pull-in instability of micro-structure under electro-static loading Sensors and Actuators A 127 2006 366 380
15. J.G. Guo, L.J. Zhou, and Y.P. Zhao Instability analysis of torsional MEMS/NEMS actuators under capillary force Journal of Colloid and Interface Science 331 2009 458 462
16. M.I. Younis, F. Asaleem, and D. Jordy The response of clamped-clamped micro-beams under mechanical shock International Journal of Non-Linear Mechanics 42 2007 643 657 (Pubitemid 46874403)
17. M. Dequesnes, Z. Tang, and N.R. Aluru Static and dynamic analysis of carbon nanotube-based switches Journal of Engineering Materials and Technology 126 2004 230 237 (Pubitemid 40122736)
18. M. Dequesnes, S.V. Rotkin, and N.R. Aluru Parameterization of continuum theories for single wall carbon nanotube switches by molecular dynamics simulations Journal of Computational Electronics 1 2002 313 316
19. F. Vakili-Tahami, H. Mobki, A-a. keyvani-janbahan, and G. Rezazadeh Pull-in phenomena and dynamic response of capacitive nano-beam switch Sensors and Transducers Journal 110 2009 26 37
20. J.D. Jackson Classical Electrodynamics third ed. 1998 Wiley
21. W.H. Lin, and Y.P. Zhao Casimir effect on the pull-in parameters of nanometer switches Microsystem Technologies 11 2005 80 85
22. W.H. Lin, and Y.P. Zhao Nonlinear behavior for nanoscales electrostatic actuators with Casimir force Chaos, Solitons & Fractals 23 2005 1777 1785
23. S. Rao Vibration of Continuous Systems 2007 Wiley New York
24. P. Osterberg, Electrostatically Actuated Microelectromechanical Test Structures for Material Property Measurement, Ph.D. Thesis, MIT, Cambridge, 1995.
25. A.H. Nayfeh, and B. Balachandran Applied Nonlinear Dynamics 2004 Wiley
26. R. Seydel Practical Bifurcation and Stability Analysis third ed. 2010 Springer