메뉴 건너뛰기




Volumn 76, Issue 1, 2014, Pages 839-852

Tuning the primary resonances of a micro resonator, using piezoelectric actuation

Author keywords

Clamped clamped microbeam; Piezoelectric actuation; Primary resonance; Secondary resonance; Shooting method

Indexed keywords

CIRCUIT RESONANCE; ELECTROMECHANICAL FILTERS; ELECTROSTATIC ACTUATORS; FREQUENCY RESPONSE; HARMONIC ANALYSIS; NATURAL FREQUENCIES; RESONATORS;

EID: 84899120448     PISSN: 0924090X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11071-013-1173-4     Document Type: Article
Times cited : (56)

References (33)
  • 3
    • 79957749622 scopus 로고    scopus 로고
    • Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation
    • 10.1016/j.apm.2011.03.049 1228.74027
    • Azizi, S.; et al.: Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation. Appl. Math. Model. 35(10), 4796-4815 (2011)
    • (2011) Appl. Math. Model. , vol.35 , Issue.10 , pp. 4796-4815
    • Azizi, S.1
  • 4
    • 34249873242 scopus 로고    scopus 로고
    • The response of clamped-clamped microbeams under mechanical shock
    • 10.1016/j.ijnonlinmec.2007.01.017
    • Younis, M.I.; Alsaleem, F.M.; Jordy, D.: The response of clamped-clamped microbeams under mechanical shock. Non-Linear Mech. 42, 643-657 (2007)
    • (2007) Non-Linear Mech. , vol.42 , pp. 643-657
    • Younis, M.I.1    Alsaleem, F.M.2    Jordy, D.3
  • 5
    • 33748783355 scopus 로고    scopus 로고
    • Application of piezoelectric layers in electrostatic MEM actuators: Controlling of pull-in voltage
    • 10.1007/s00542-006-0245-5
    • Rezazadeh, G.; Tahmasebi, A.; Zubstov, M.: Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage. Microsyst. Technol. 12(12), 1163-1170 (2006)
    • (2006) Microsyst. Technol. , vol.12 , Issue.12 , pp. 1163-1170
    • Rezazadeh, G.1    Tahmasebi, A.2    Zubstov, M.3
  • 6
    • 77955780230 scopus 로고    scopus 로고
    • Nonlinear analysis of MEMS electrostatic microactuators: Primary and second resonances of the first mode
    • 10.1177/1077546309106520 1269.74099 2730039
    • Najar, F.; et al.: Nonlinear analysis of MEMS electrostatic microactuators: primary and second resonances of the first mode. J. Vib. Control 16(9), 1321-1349 (2010)
    • (2010) J. Vib. Control , vol.16 , Issue.9 , pp. 1321-1349
    • Najar, F.1
  • 7
    • 24644513877 scopus 로고    scopus 로고
    • Dynamics of MEMS resonators under superharmonic and subharmonic excitations
    • 10.1088/0960-1317/15/10/008
    • Nayfeh, A.H.; Younis, M.I.: Dynamics of MEMS resonators under superharmonic and subharmonic excitations. J. Micromech. Microeng. 15, 1840-1847 (2005)
    • (2005) J. Micromech. Microeng. , vol.15 , pp. 1840-1847
    • Nayfeh, A.H.1    Younis, M.I.2
  • 8
    • 21844478095 scopus 로고    scopus 로고
    • Reduced-order models for MEMS applications
    • 10.1007/s11071-005-2809-9 2157181
    • Nayfeh, A.H.; Younis, M.I.; Abdel-Rahman, E.M.: Reduced-order models for MEMS applications. Nonlinear Dyn. 41, 26 (2005)
    • (2005) Nonlinear Dyn. , vol.41 , pp. 26
    • Nayfeh, A.H.1    Younis, M.I.2    Abdel-Rahman, E.M.3
  • 10
    • 33846559280 scopus 로고    scopus 로고
    • Dynamic pull-in phenomenon in MEMS resonators
    • 10.1007/s11071-006-9079-z 1177.74191 2157181
    • Nayfeh, A.; Younis, M.; Abdel-Rahman, E.: Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dyn. 48(1), 153-163 (2007)
    • (2007) Nonlinear Dyn. , vol.48 , Issue.1 , pp. 153-163
    • Nayfeh, A.1    Younis, M.2    Abdel-Rahman, E.3
  • 13
    • 84879783998 scopus 로고    scopus 로고
    • Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam
    • 10.1007/s11071-013-0837-4 1281.74027 3080716
    • Azizi, S.; et al.: Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam. Nonlinear Dyn. 73(1-2), 853-867 (2013)
    • (2013) Nonlinear Dyn. , vol.73 , Issue.1-2 , pp. 853-867
    • Azizi, S.1
  • 14
    • 0038015813 scopus 로고    scopus 로고
    • Secondary resonances of electrically actuated resonant microsensors
    • 10.1088/0960-1317/13/3/320
    • Abdel-Rahman, E.M.; Nayfeh, A.H.: Secondary resonances of electrically actuated resonant microsensors. J. Micromech. Microeng. 13, 491-501 (2003)
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 491-501
    • Abdel-Rahman, E.M.1    Nayfeh, A.H.2
  • 15
    • 0037284599 scopus 로고    scopus 로고
    • A study of the nonlinear response of a resonant microbeam to an electric actuation
    • 10.1023/A:1022103118330 1047.74027 2157181
    • Younis, M.I.; Nayfeh, A.H.: A study of the nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31(1), 91-117 (2003)
    • (2003) Nonlinear Dyn. , vol.31 , Issue.1 , pp. 91-117
    • Younis, M.I.1    Nayfeh, A.H.2
  • 16
    • 36949031721 scopus 로고    scopus 로고
    • Chaos for a microelectromechanical oscillator governed by the nonlinear Mathieu equation
    • 10.1109/JMEMS.2007.906757
    • DeMartini, B.E.; et al.: Chaos for a microelectromechanical oscillator governed by the nonlinear Mathieu equation. J. Microelectromech. Syst. 16(6), 1314-1323 (2007)
    • (2007) J. Microelectromech. Syst. , vol.16 , Issue.6 , pp. 1314-1323
    • Demartini, B.E.1
  • 17
    • 77950859560 scopus 로고    scopus 로고
    • Chaos prediction and control in MEMS resonators
    • 10.1016/j.cnsns.2009.10.002
    • Haghighi, S.H.; Markazi, A.H.D.: Chaos prediction and control in MEMS resonators. Commun. Nonlinear Sci. Numer. Simul. 15(10), 3091 (2010)
    • (2010) Commun. Nonlinear Sci. Numer. Simul. , vol.15 , Issue.10 , pp. 3091
    • Haghighi, S.H.1    Markazi, A.H.D.2
  • 18
    • 0005845002 scopus 로고    scopus 로고
    • Normalized abacus for the global behavior of diaphragms: Pneumatic, electrostatic, piezoelectric or electromagnetic actuation
    • Francais, O.; Dufour, I.: Normalized abacus for the global behavior of diaphragms: pneumatic, electrostatic, piezoelectric or electromagnetic actuation. J. Model. Simul. Microsyst. 1, 149-160 (1999)
    • (1999) J. Model. Simul. Microsyst. , vol.1 , pp. 149-160
    • Francais, O.1    Dufour, I.2
  • 19
    • 0031224230 scopus 로고    scopus 로고
    • Simulation, design and fabrication of electroplated acceleration switches
    • 10.1088/0960-1317/7/3/042
    • Tonnesen, T.; et al.: Simulation, design and fabrication of electroplated acceleration switches. J. Micromech. Microeng. 7, 237-245 (1997)
    • (1997) J. Micromech. Microeng. , vol.7 , pp. 237-245
    • Tonnesen, T.1
  • 22
    • 0005641159 scopus 로고
    • Problem encountered in the development of the microscale G-switch using three design approaches
    • Tokyo, Japan
    • Robinson, C.; et al.: Problem encountered in the development of the microscale G-switch using three design approaches. In: Proc. Int. Conf. on Solid-State Sensors and Actuators, Tokyo, Japan, pp. 410-412 (1987)
    • (1987) Proc. Int. Conf. on Solid-State Sensors and Actuators , pp. 410-412
    • Robinson, C.1
  • 23
    • 0015282064 scopus 로고
    • Microminiature ganged threshold accelerometers compatible with integrated circuit technology
    • 10.1109/T-ED.1972.17368
    • Frobenius, W.D.; et al.: Microminiature ganged threshold accelerometers compatible with integrated circuit technology. IEEE Trans. Electron Devices 19, 37-40 (1972)
    • (1972) IEEE Trans. Electron Devices , vol.19 , pp. 37-40
    • Frobenius, W.D.1
  • 24
    • 0011908465 scopus 로고
    • The coalescence of closely spaced drops when they are at different electric potentials
    • 10.1098/rspa.1968.0159
    • Taylor, G.L.: The coalescence of closely spaced drops when they are at different electric potentials. Proc. R. Soc. A, Math. Phys. Eng. Sci. 306, 423-434 (1968)
    • (1968) Proc. R. Soc. A, Math. Phys. Eng. Sci. , vol.306 , pp. 423-434
    • Taylor, G.L.1
  • 25
    • 84925175290 scopus 로고
    • The resonant gate transistor
    • 10.1109/T-ED.1967.15912
    • Nathanson, H.C.; et al.: The resonant gate transistor. IEEE Trans. Electron Devices 14, 117-133 (1967)
    • (1967) IEEE Trans. Electron Devices , vol.14 , pp. 117-133
    • Nathanson, H.C.1
  • 26
    • 68849107061 scopus 로고    scopus 로고
    • On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators
    • 045013 10.1088/0960-1317/19/4/045013
    • Alsaleem, F.M.; Younis, M.I.; Ouakad, H.M.: On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators. J. Micromech. Microeng. 19, 045013 (2009)
    • (2009) J. Micromech. Microeng. , vol.19
    • Alsaleem, F.M.1    Younis, M.I.2    Ouakad, H.M.3
  • 27
    • 0037284599 scopus 로고    scopus 로고
    • A study on the nonlinear response of a resonant microbeam to an electric actuation
    • 10.1023/A:1022103118330 1047.74027
    • Younis, M.I.; Nayfeh, A.H.: A study on the nonlinear response of a resonant microbeam to an electric actuation. J. Nonlinear Dyn. 31, 91-117 (2003)
    • (2003) J. Nonlinear Dyn. , vol.31 , pp. 91-117
    • Younis, M.I.1    Nayfeh, A.H.2
  • 29
    • 0242636509 scopus 로고    scopus 로고
    • A reduced order model for electrically actuated microbeam-based MEMS
    • 10.1109/JMEMS.2003.818069
    • Younis, M.I.; Abdel-Rahman, E.M.; Nayfeh, A.H.: A reduced order model for electrically actuated microbeam-based MEMS. J. Microelectromech. Syst. 12(2), 672-680 (2003)
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.2 , pp. 672-680
    • Younis, M.I.1    Abdel-Rahman, E.M.2    Nayfeh, A.H.3
  • 30
    • 79953058612 scopus 로고    scopus 로고
    • Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators
    • 10.1016/j.jfranklin.2011.01.007 05908473 2785444
    • Vahdat, A.S.; Rezazadeh, G.: Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators. J. Franklin Inst. 348(4), 622-639 (2011)
    • (2011) J. Franklin Inst. , vol.348 , Issue.4 , pp. 622-639
    • Vahdat, A.S.1    Rezazadeh, G.2
  • 31
    • 84855676803 scopus 로고    scopus 로고
    • Parametric excitation of a piezoelectrically actuated system near Hopf bifurcation
    • 10.1016/j.apm.2011.09.031 1243.74081 2878127
    • Azizi, S.; et al.: Parametric excitation of a piezoelectrically actuated system near Hopf bifurcation. Appl. Math. Model. 36(4), 1529-1549 (2012)
    • (2012) Appl. Math. Model. , vol.36 , Issue.4 , pp. 1529-1549
    • Azizi, S.1
  • 32
    • 81155130931 scopus 로고    scopus 로고
    • Stability analysis of a parametrically excited functionally graded piezoelectric, MEM system
    • 10.1016/j.cap.2011.08.001 2954640
    • Azizi, S.; et al.: Stability analysis of a parametrically excited functionally graded piezoelectric, MEM system. Current Appl. Phys. 12(2), 456-466 (2012)
    • (2012) Current Appl. Phys. , vol.12 , Issue.2 , pp. 456-466
    • Azizi, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.