MEMS-based conjugate surfaces flexure hinge

Journal of Mechanical Design

Volumn 137, Issue 1, 2015, Pages

  Verotti, Matteo ^a   Crescenzi, Rocco ^a   Balucani, Marco ^a   Belfiore, Nicola P ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; FLEXIBLE STRUCTURES; HINGES; MEMS; REACTIVE ION ETCHING;

CONJUGATE SURFACES; CURVED BEAMS; FLEXIBLE BEAM; FLEXIBLE ELEMENTS; FLEXURE HINGE; LOAD CONDITION; MEMS APPLICATIONS; MINIMUM STRESS; REVOLUTE JOINTS; STRESS CONDITION;

CONTINUUM MECHANICS;

EID: 84929587563     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.4028791     Document Type: Article

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