The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages

Mechanism and Machine Theory

Volumn 43, Issue 3, 2008, Pages 347-363

  Yong, Yuen Kuan ^a   Lu, Tien Fu ^a  

^a UNIVERSITY OF ADELAIDE   (Australia)

Author keywords

Flexure hinge equation; Micro motion stage; Output compliance

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MOTION ESTIMATION;

FLEXURE HINGE EQUATION; MICRO-MOTION STAGE; OUTPUT COMPLIANCE;

EQUATIONS OF MOTION;

EID: 38549091765     PISSN: 0094114X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmachtheory.2007.03.007     Document Type: Article

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