The development of a MEMS/NEMS-based 3 D.O.F. compliant micro robot

International Journal of Mechanics and Control

Volumn 12, Issue 1, 2011, Pages 3-10

  Balucani, Marco ^a   Belfiore, Nicola Pio ^a   Crescenzi, Rocco ^a   Verotti, Matteo ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

Compliant mechanisms; MEMS; Micro robot

Indexed keywords

EID: 84901671571     PISSN: 15908844     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Luharuka R. and Hesketh P. J., Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications. Sensors and Actuators, A 134 (2007) 231238.
2. Brouwera D. M., De Jongc B. R. and Soemers H. M. J. R., Design and modeling of a six DOFs MEMSbased precision manipulator. Precision Engineering, 34 (2010) 307319.
3. Kota S., Joo J., Li Z., Rodgers S. M. and Sniegowski J., Design of compliant mechanisms: applications to MEMS. Analog Integrated Circuits and Signal Processing, 29, 715, 2001.
4. Jang G.-W., Kim K. J. and Kim Y. Y., Integrated topology and shape optimization software for compliant MEMS mechanism design. Advances in Engineering Software, 39 (2008) 114.
5. Balucani M., Conductive microstructure obtained by converting porous silicon into porous metal, European Patent Application EP20080425186.
6. Balucani M., System for contacting electronic devices and production processes thereof, United States Patent Application 20080012114.
7. Belfiore N.P., Scaccia M., Ianniello F., Presta M., Selective compliance hinge, World Intellectual Property Organization, WO/2009/034551, Int. Appl. No. PCT/IB2008/053697, Publ. Date March, 19th, 2009.
8. Belfiore N.P., Scaccia M., Ianniello F., Presta M., Perfetti L., Selective compliance wire actuated mobile platform, particularly for endoscopiy surgical devices, World Intellectual Property Organization, WO/2009/034552, Int. Appl. No. PCT/IB2008/053698, Publ. Date March, 19th, 2009.