Fabrication of high-performance ultrathin In2O3 film field-effect transistors and biosensors using chemical lift-off lithography

ACS Nano

Volumn 9, Issue 4, 2015, Pages 4572-4582

  Kim, Jaemyung ^a   Rim, You Seung ^a,b   Chen, Huajun ^a,b   Cao, Huan H ^a   Nakatsuka, Nako ^a   Hinton, Hannah L ^a   Zhao, Chuanzhen ^a,c   Andrews, Anne M ^a,d   Yang, Yang ^a,b   Weiss, Paul S ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Engineering IV   (United States)

^c BEIJING INSTITUTE OF TECHNOLOGY   (China)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

aptamer; biosensor; chemical lift off lithography; dopamine; field effect transistor; metal oxide semiconductor; nanofabrication; nanotechnology; neurotransmitter; sensor; sol gel chemistry

Indexed keywords

AMINES; BIOSENSORS; COATINGS; FABRICATION; INDIUM COMPOUNDS; LITHOGRAPHY; METALS; MOS DEVICES; NANOTECHNOLOGY; NEUROPHYSIOLOGY; OXIDE SEMICONDUCTORS; SEMICONDUCTING FILMS; SENSORS; SOL-GEL PROCESS; TEMPERATURE; ULTRATHIN FILMS;

APTAMERS; CHEMICAL LIFT-OFFS; DOPAMINE; METAL OXIDE SEMICONDUCTOR; NEUROTRANSMITTER; SOL-GEL CHEMISTRY;

FIELD EFFECT TRANSISTORS;

APTAMER; DOPAMINE; INDIUM; INDIUM OXIDE;

CHEMISTRY; DEVICES; GENETIC PROCEDURES; GENETICS; LIMIT OF DETECTION; METABOLISM; NANOTECHNOLOGY; NUCLEOTIDE SEQUENCE; PRINTING; SEMICONDUCTOR;

APTAMERS, NUCLEOTIDE; BASE SEQUENCE; BIOSENSING TECHNIQUES; DOPAMINE; INDIUM; LIMIT OF DETECTION; NANOTECHNOLOGY; PRINTING; TRANSISTORS, ELECTRONIC;

EID: 84928967067     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/acsnano.5b01211     Document Type: Article

References (78)

1. Schoning, M. J.; Poghossian, A. Recent Advances in Biologically Sensitive Field-Effect Transistors (BioFETs) Analyst 2002, 127, 1137-1151
2. Patolsky, F.; Lieber, C. M. Nanowire Nanosensors Mater. Today 2005, 8, 20-28
3. Allen, B. L.; Kichambare, P. D.; Star, A. Carbon Nanotube Field-Effect-Transistor-Based Biosensors Adv. Mater. 2007, 19, 1439-1451
4. Curreli, M.; Rui, Z.; Ishikawa, F. N.; Chang, H.-K.; Cote, R. J.; Chongwu, Z.; Thompson, M. E. Real-Time, Label-Free Detection of Biological Entities Using Nanowire-Based FETs IEEE Trans. Nanotechnol. 2008, 7, 651-667
5. Cui, Y.; Wei, Q.; Park, H.; Lieber, C. M. Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species Science 2001, 293, 1289-1292
6. Hahm, J.-I.; Lieber, C. M. Direct Ultrasensitive Electrical Detection of DNA and DNA Sequence Variations Using Nanowire Nanosensors Nano Lett. 2003, 4, 51-54
7. Wang, W. U.; Chen, C.; Lin, K.-H.; Fang, Y.; Lieber, C. M. Label-Free Detection of Small-Molecule-Protein Interactions by Using Nanowire Nanosensors Proc. Natl. Acad. Sci. U. S. A. 2005, 102, 3208-3212
8. Zheng, G.; Patolsky, F.; Cui, Y.; Wang, W. U.; Lieber, C. M. Multiplexed Electrical Detection of Cancer Markers with Nanowire Sensor Arrays Nat. Biotechnol. 2005, 23, 1294-1301
9. Stern, E.; Klemic, J. F.; Routenberg, D. A.; Wyrembak, P. N.; Turner-Evans, D. B.; Hamilton, A. D.; LaVan, D. A.; Fahmy, T. M.; Reed, M. A. Label-Free Immunodetection with CMOS-Compatible Semiconducting Nanowires Nature 2007, 445, 519-522
10. Li, B.-R.; Hsieh, Y.-J.; Chen, Y.-X.; Chung, Y.-T.; Pan, C.-Y.; Chen, Y.-T. An Ultrasensitive Nanowire-Transistor Biosensor for Detecting Dopamine Release from Living PC12 Cells under Hypoxic Stimulation J. Am. Chem. Soc. 2013, 135, 16034-16037
11. Besteman, K.; Lee, J.-O.; Wiertz, F. G. M.; Heering, H. A.; Dekker, C. Enzyme-Coated Carbon Nanotubes as Single-Molecule Biosensors Nano Lett. 2003, 3, 727-730
12. Chen, R. J.; Bangsaruntip, S.; Drouvalakis, K. A.; Kam, N. W. S.; Shim, M.; Li, Y.; Kim, W.; Utz, P. J.; Dai, H. Noncovalent Functionalization of Carbon Nanotubes for Highly Specific Electronic Biosensors Proc. Natl. Acad. Sci. U. S. A. 2003, 100, 4984-4989
13. So, H.-M.; Won, K.; Kim, Y. H.; Kim, B.-K.; Ryu, B. H.; Na, P. S.; Kim, H.; Lee, J.-O. Single-Walled Carbon Nanotube Biosensors Using Aptamers as Molecular Recognition Elements J. Am. Chem. Soc. 2005, 127, 11906-11907
14. 3 Nanowires and Carbon Nanotubes to Low-Density Lipoprotein Chemical Gating Appl. Phys. Lett. 2005, 86, 103903
15. Maehashi, K.; Katsura, T.; Kerman, K.; Takamura, Y.; Matsumoto, K.; Tamiya, E. Label-Free Protein Biosensor Based on Aptamer-Modified Carbon Nanotube Field-Effect Transistors Anal. Chem. 2006, 79, 782-787
16. Kim, S. N.; Rusling, J. F.; Papadimitrakopoulos, F. Carbon Nanotubes for Electronic and Electrochemical Detection of Biomolecules Adv. Mater. 2007, 19, 3214-3228
17. Martinez, M. T.; Tseng, Y.-C.; Ormategui, N.; Loinaz, I.; Eritja, R.; Bokor, J. Label-Free DNA Biosensors Based on Functionalized Carbon Nanotube Field Effect Transistors Nano Lett. 2009, 9, 530-536
18. Patolsky, F.; Zheng, G.; Hayden, O.; Lakadamyali, M.; Zhuang, X.; Lieber, C. M. Electrical Detection of Single Viruses Proc. Natl. Acad. Sci. U. S. A. 2004, 101, 14017-14022
19. Alivisatos, A. P.; Andrews, A. M.; Boyden, E. S.; Chun, M.; Church, G. M.; Deisseroth, K.; Donoghue, J. P.; Fraser, S. E.; Lippincott-Schwartz, J.; Looger, L. L. et al. Nanotools for Neuroscience and Brain Activity Mapping ACS Nano 2013, 7, 1850-1866
20. Ohno, Y.; Maehashi, K.; Matsumoto, K. Label-Free Biosensors Based on Aptamer-Modified Graphene Field-Effect Transistors J. Am. Chem. Soc. 2010, 132, 18012-18013
21. Huang, Y.; Dong, X.; Shi, Y.; Li, C. M.; Li, L.-J.; Chen, P. Nanoelectronic Biosensors Based on CVD Grown Graphene Nanoscale 2010, 2, 1485-1488
22. Yang, W.; Ratinac, K. R.; Ringer, S. P.; Thordarson, P.; Gooding, J. J.; Braet, F. Carbon Nanomaterials in Biosensors: Should You Use Nanotubes or Graphene? Angew. Chem., Int. Ed. 2010, 49, 2114-2138
23. Pumera, M. Graphene in Biosensing Mater. Today 2011, 14, 308-315
24. He, Q.; Sudibya, H. G.; Yin, Z.; Wu, S.; Li, H.; Boey, F.; Huang, W.; Chen, P.; Zhang, H. Centimeter-Long and Large-Scale Micropatterns of Reduced Graphene Oxide Films: Fabrication and Sensing Applications ACS Nano 2010, 4, 3201-3208
25. 2 Field-Effect Transistor for Next-Generation Label-Free Biosensors ACS Nano 2014, 8, 3992-4003
26. 2 Nanosheet-Based Field-Effect Biosensor for Label-Free Sensitive Detection of Cancer Marker Proteins in Solution Small 2014, 10, 1101-1105
27. Morales, A. M.; Lieber, C. M. A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires Science 1998, 279, 208-211
28. Hochbaum, A. I.; Fan, R.; He, R.; Yang, P. Controlled Growth of Si Nanowire Arrays for Device Integration Nano Lett. 2005, 5, 457-460
29. Fan, S.; Chapline, M. G.; Franklin, N. R.; Tombler, T. W.; Cassell, A. M.; Dai, H. Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties Science 1999, 283, 512-514
30. Hata, K.; Futaba, D. N.; Mizuno, K.; Namai, T.; Yumura, M.; Iijima, S. Water-Assisted Highly Efficient Synthesis of Impurity-Free Single-Walled Carbon Nanotubes Science 2004, 306, 1362-1364
31. Hersam, M. C. Progress Towards Monodisperse Single-Walled Carbon Nanotubes Nat. Nanotechnol. 2008, 3, 387-394
32. Arnold, M. S.; Green, A. A.; Hulvat, J. F.; Stupp, S. I.; Hersam, M. C. Sorting Carbon Nanotubes by Electronic Structure Using Density Differentiation Nat. Nanotechnol. 2006, 1, 60-65
33. Zheng, M.; Jagota, A.; Strano, M. S.; Santos, A. P.; Barone, P.; Chou, S. G.; Diner, B. A.; Dresselhaus, M. S.; Mclean, R. S.; Onoa, G. B. et al. Structure-Based Carbon Nanotube Sorting by Sequence-Dependent DNA Assembly Science 2003, 302, 1545-1548
34. Sun, Z.; Yan, Z.; Yao, J.; Beitler, E.; Zhu, Y.; Tour, J. M. Growth of Graphene from Solid Carbon Sources Nature 2010, 468, 549-552
35. Li, X.; Cai, W.; An, J.; Kim, S.; Nah, J.; Yang, D.; Piner, R.; Velamakanni, A.; Jung, I.; Tutuc, E. et al. Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils Science 2009, 324, 1312-1314
36. Bai, J.; Liao, L.; Zhou, H.; Cheng, R.; Liu, L.; Huang, Y.; Duan, X. Top-Gated Chemical Vapor Deposition Grown Graphene Transistors with Current Saturation Nano Lett. 2011, 11, 2555-2559
37. 2 Atomic Layers with Chemical Vapor Deposition Adv. Mater. 2012, 24, 2320-2325
38. Lee, Y.-H.; Yu, L.; Wang, H.; Fang, W.; Ling, X.; Shi, Y.; Lin, C.-T.; Huang, J.-K.; Chang, M.-T.; Chang, C.-S. et al. Synthesis and Transfer of Single-Layer Transition Metal Disulfides on Diverse Surfaces Nano Lett. 2013, 13, 1852-1857
39. Li, X.; Zhu, Y.; Cai, W.; Borysiak, M.; Han, B.; Chen, D.; Piner, R. D.; Colombo, L.; Ruoff, R. S. Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes Nano Lett. 2009, 9, 4359-4363
40. Lee, Y.; Bae, S.; Jang, H.; Jang, S.; Zhu, S.-E.; Sim, S. H.; Song, Y. I.; Hong, B. H.; Ahn, J.-H. Wafer-Scale Synthesis and Transfer of Graphene Films Nano Lett. 2010, 10, 490-493
41. Lin, Y.-C.; Lu, C.-C.; Yeh, C.-H.; Jin, C.; Suenaga, K.; Chiu, P.-W. Graphene Annealing: How Clean Can It Be? Nano Lett. 2011, 12, 414-419
42. 2 Appl. Phys. Lett. 2011, 99, 122108
43. Liao, W.-S.; Cheunkar, S.; Cao, H. H.; Bednar, H. R.; Weiss, P. S.; Andrews, A. M. Subtractive Patterning via Chemical Lift-Off Lithography Science 2012, 337, 1517-1521
44. Ishikawa, F. N.; Chang, H.-K.; Curreli, M.; Liao, H.-I.; Olson, C. A.; Chen, P.-C.; Zhang, R.; Roberts, R. W.; Sun, R.; Cote, R. J. et al. Label-Free, Electrical Detection of the SARS Virus N-Protein with Nanowire Biosensors Utilizing Antibody Mimics as Capture Probes ACS Nano 2009, 3, 1219-1224
45. 3 Nanowire Mat Devices for Biosensing Applications J. Am. Chem. Soc. 2005, 127, 6922-6923
46. Ishikawa, F. N.; Curreli, M.; Chang, H.-K.; Chen, P.-C.; Zhang, R.; Cote, R. J.; Thompson, M. E.; Zhou, C. A Calibration Method for Nanowire Biosensors to Suppress Device-to-Device Variation ACS Nano 2009, 3, 3969-3976
47. Hwang, Y. H.; Seo, J.-S.; Yun, J. M.; Park, H.; Yang, S.; Park, S.-H. K.; Bae, B.-S. An 'Aqueous Route for the Fabrication of Low-Temperature-Processable Oxide Flexible Transparent Thin-Film Transistors on Plastic Substrates NPG Asia Mater. 2013, 5, e45
48. Sze, S. M.; Ng, K. K. Physics of Semiconductor Devices, 3 rd ed.; Wiley-Interscience: Hoboken, NJ, 2007; pp 293-373.
49. Kumar, A.; Whitesides, G. M. Features of Gold Having Micrometer to Centimeter Dimensions Can Be Formed through a Combination of Stamping with an Elastomeric Stamp and an Alkanethiol ''Ink Followed by Chemical Etching Appl. Phys. Lett. 1993, 63, 2002-2004
50. Srinivasan, C.; Mullen, T. J.; Hohman, J. N.; Anderson, M. E.; Dameron, A. A.; Andrews, A. M.; Dickey, E. C.; Horn, M. W.; Weiss, P. S. Scanning Electron Microscopy of Nanoscale Chemical Patterns ACS Nano 2007, 1, 191-201
51. Braunschweig, A. B.; Huo, F.; Mirkin, C. A. Molecular Printing Nat. Chem. 2009, 1, 353-358
52. Kim, H. S.; Byrne, P. D.; Facchetti, A.; Marks, T. J. High Performance Solution-Processed Indium Oxide Thin-Film Transistors J. Am. Chem. Soc. 2008, 130, 12580-12581
53. Rim, Y. S.; Lim, H. S.; Kim, H. J. Low-Temperature Metal-Oxide Thin-Film Transistors Formed by Directly Photopatternable and Combustible Solution Synthesis ACS Appl. Mater. Interfaces 2013, 5, 3565-3571
54. Choi, C.-H.; Han, S.-Y.; Su, Y.-W.; Fang, Z.; Lin, L.-Y.; Cheng, C.-C.; Chang, C.-H. Fabrication of High-Performance, Low-Temperature Solution Processed Amorphous Indium Oxide Thin-Film Transistors Using a Volatile Nitrate Precursor J. Mater. Chem. C 2015, 3, 854-860
55. Kim, M.-G.; Kanatzidis, M. G.; Facchetti, A.; Marks, T. J. Low-Temperature Fabrication of High-Performance Metal Oxide Thin-Film Electronics via Combustion Processing Nat. Mater. 2011, 10, 382-388
56. Joo Hyon, N.; Seung Yoon, R.; Sung Jin, J.; Chang Su, K.; Sung-Woo, S.; Rack, P. D.; Dong-Joo, K.; Hong Koo, B. Indium Oxide Thin-Film Transistors Fabricated by RF Sputtering at Room Temperature IEEE Electron Device Lett. 2010, 31, 567-569
57. 3 Thin Film Transistors Fabricated by Magnetron Sputtering Electron. Mater. Lett. 2013, 9, 279-282
58. Rim, Y. S.; Chen, H.; Kou, X.; Duan, H.-S.; Zhou, H.; Cai, M.; Kim, H. J.; Yang, Y. Boost Up Mobility of Solution-Processed Metal Oxide Thin-Film Transistors via Confining Structure on Electron Pathways Adv. Mater. 2014, 26, 4273-4278
59. Mannironi, C.; Di Nardo, A.; Fruscoloni, P.; Tocchini-Valentini, G. P. In Vitro Selection of Dopamine RNA Ligands Biochemistry 1997, 36, 9726-9734
60. Walsh, R.; DeRosa, M. C. Retention of Function in the DNA Homolog of the RNA Dopamine Aptamer Biochem. Biophys. Res. Commun. 2009, 388, 732-735
61. Farjami, E.; Campos, R.; Nielsen, J. S.; Gothelf, K. V.; Kjems, J.; Ferapontova, E. E. RNA Aptamer-Based Electrochemical Biosensor for Selective and Label-Free Analysis of Dopamine Anal. Chem. 2012, 85, 121-128
62. Giros, B.; Jaber, M.; Jones, S. R.; Wightman, R. M.; Caron, M. G. Hyperlocomotion and Indifference to Cocaine and Amphetamine in Mice Lacking the Dopamine Transporter Nature 1996, 379, 606-612
63. Kim, J.-H.; Auerbach, J. M.; Rodriguez-Gomez, J. A.; Velasco, I.; Gavin, D.; Lumelsky, N.; Lee, S.-H.; Nguyen, J.; Sanchez-Pernaute, R.; Bankiewicz, K. et al. Dopamine Neurons Derived from Embryonic Stem Cells Function in an Animal Model of Parkinsons Disease Nature 2002, 418, 50-56
64. Phillips, P. E. M.; Stuber, G. D.; Heien, M. L. A. V.; Wightman, R. M.; Carelli, R. M. Subsecond Dopamine Release Promotes Cocaine Seeking Nature 2003, 422, 614-618
65. Unger, E. L.; Eve, D. J.; Perez, X. A.; Reichenbach, D. K.; Xu, Y.; Lee, M. K.; Andrews, A. M. Locomotor Hyperactivity and Alterations in Dopamine Neurotransmission Are Associated with Overexpression of A53T Mutant Human α-Synuclein in Mice Neurobiol. Dis. 2006, 21, 431-443
66. Aswal, D. K.; Lenfant, S.; Guerin, D.; Yakhmi, J. V.; Vuillaume, D. Self Assembled Monolayers on Silicon for Molecular Electronics Anal. Chim. Acta 2006, 568, 84-108
67. 2 Langmuir 2002, 18, 8924-8928
68. Kim, J. S.; Park, J. H.; Lee, J. H.; Jo, J.; Kim, D.-Y.; Cho, K. Control of the Electrode Work Function and Active Layer Morphology via Surface Modification of Indium Tin Oxide for High Efficiency Organic Photovoltaics Appl. Phys. Lett. 2007, 91, 112111
69. Chung, Y.; Verploegen, E.; Vailionis, A.; Sun, Y.; Nishi, Y.; Murmann, B.; Bao, Z. Controlling Electric Dipoles in Nanodielectrics and Its Applications for Enabling Air-Stable N-Channel Organic Transistors Nano Lett. 2011, 11, 1161-1165
70. Song, C. K.; Luck, K. A.; Zhou, N.; Zeng, L.; Heitzer, H. M.; Manley, E. F.; Goldman, S.; Chen, L. X.; Ratner, M. A.; Bedzyk, M. J. et al. Supersaturated Self-Assembled Charge-Selective Interfacial Layers for Organic Solar Cells J. Am. Chem. Soc. 2014, 136, 17762-17773
71. Baker, B. R.; Lai, R. Y.; Wood, M. S.; Doctor, E. H.; Heeger, A. J.; Plaxco, K. W. An Electronic, Aptamer-Based Small-Molecule Sensor for the Rapid, Label-Free Detection of Cocaine in Adulterated Samples and Biological Fluids J. Am. Chem. Soc. 2006, 128, 3138-3139
72. Ferapontova, E. E.; Olsen, E. M.; Gothelf, K. V. An RNA Aptamer-Based Electrochemical Biosensor for Detection of Theophylline in Serum J. Am. Chem. Soc. 2008, 130, 4256-4258
73. Fan, C.; Plaxco, K. W.; Heeger, A. J. Electrochemical Interrogation of Conformational Changes as a Reagentless Method for the Sequence-Specific Detection of DNA Proc. Natl. Acad. Sci. U. S. A. 2003, 100, 9134-9137
74. Zuo, X.; Song, S.; Zhang, J.; Pan, D.; Wang, L.; Fan, C. A Target-Responsive Electrochemical Aptamer Switch (TREAS) for Reagentless Detection of Nanomolar ATP J. Am. Chem. Soc. 2007, 129, 1042-1043
75. Farjami, E.; Clima, L.; Gothelf, K.; Ferapontova, E. E. Off-On Electrochemical Hairpin-DNA-Based Genosensor for Cancer Diagnostics Anal. Chem. 2011, 83, 1594-1602
76. Singh, Y. S.; Sawarynski, L. E.; Dabiri, P. D.; Choi, W. R.; Andrews, A. M. Head-to-Head Comparisons of Carbon Fiber Microelectrode Coatings for Sensitive and Selective Neurotransmitter Detection by Voltammetry Anal. Chem. 2011, 83, 6658-6666
77. Zheng, Y.; Wang, Y.; Yang, X. Aptamer-Based Colorimetric Biosensing of Dopamine Using Unmodified Gold Nanoparticles Sens. Actuators, B 2011, 156, 95-99
78. Mathews, T. A.; Fedele, D. E.; Coppelli, F. M.; Avila, A. M.; Murphy, D. L.; Andrews, A. M. Gene Dose-Dependent Alterations in Extraneuronal Serotonin but Not Dopamine in Mice with Reduced Serotonin Transporter Expression J. Neurosci. Methods 2004, 140, 169-181