Subtractive Patterning via Chemical Lift-Off Lithography

Science

Volumn 337, Issue 6101, 2012, Pages 1517-1521

  Liao, Wei Ssu ^a   Cheunkar, Sarawut ^a,b   Cao, Huan H ^a   Bednar, Heidi R ^a   Weiss, Paul S ^a,b,c   Andrews, Anne M ^a,d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c University of California   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALKANETHIOL; GOLD; OXYGEN; PROTEIN; RUBBER; SELF ASSEMBLED MONOLAYER; SILICONE; THIOL DERIVATIVE; UNCLASSIFIED DRUG;

GOLD; MOLECULAR ANALYSIS; OXYGEN; PLASMA; PROTEIN; SUBSTRATE;

ARTICLE; ATOM; LIFT OFF LITHOGRAPHY; MOLECULAR IMPRINTING; NANOFABRICATION; PATTERN GENERATOR; PATTERN RECOGNITION; PRIORITY JOURNAL; STRUCTURE ANALYSIS; SURFACE PROPERTY;

EID: 84866443067     PISSN: 00368075     EISSN: 10959203     Source Type: Journal    
DOI: 10.1126/science.1221774     Document Type: Article

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