Controlled growth of Si nanowire arrays for device integration

Nano Letters

Volumn 5, Issue 3, 2005, Pages 457-460

  Hochbaum, Allon I ^a   Fan, Rong ^a   He, Rongrui ^a   Yang, Peidong ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COLLOIDS; EPITAXIAL GROWTH; EVAPORATION; FIELD EFFECT TRANSISTORS; GOLD COMPOUNDS; LITHOGRAPHY; PHOTORESISTS; POLYELECTROLYTES; REACTIVE ION ETCHING; SEMICONDUCTOR GROWTH; SILICON; SILICONES; SYNTHESIS (CHEMICAL); THERMOELECTRICITY;

BINARY LIQUIDS; MEMORY ARCHITECTURES; VAPOR-LIQUID-SOLID (VLS) GROWTH MECHANISM; VERTICAL FIELD-EFFECT TRANSISTOR (VFET) ARRAYS;

NANOSTRUCTURED MATERIALS;

NANOTUBE; SILICON;

ARTICLE; CHEMISTRY; COLLOID; CONFORMATION; CRYSTALLIZATION; ELECTRICITY; EVALUATION; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; SYSTEM ANALYSIS; ULTRASTRUCTURE;

COLLOIDS; CRYSTALLIZATION; ELECTRIC WIRING; MATERIALS TESTING; MOLECULAR CONFORMATION; NANOTECHNOLOGY; NANOTUBES; PARTICLE SIZE; SILICON; SYSTEMS INTEGRATION;

EID: 16244388903     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl047990x     Document Type: Article

References (26)

1. Cui, Y.; Duan, X.; Lieber, C. M. J. Phys. Chem. B 2000, 104, 5213.
2. Yu, J.-V.; Chung, S.-W.; Heath, J. R. J. Phys. Chem. B 2000, 104, 11864.
3. Cui, Y.; Lieber, C. M. Science 2001, 291, 851.
4. Li, D.; Wu, Y.; Fan, R.; Yang, P.; Majumdar, A. Appl. Phys. Lett. 2003, 83, 3186.
5. Li, D.; Wu, Y.; Kim, P.; Shi, L.; Yang, P.; Majumdar, A. Appl. Phys. Lett. 2003, 83, 2934.
6. Cui, Y.; Wei, Q.; Park, H.; Lieber, C. M. Science 2001, 293, 1289.
7. Zhong, Z.; Wang, D.; Cui, Y.; Bockrath, M. W.; Lieber, C. M. Science 2003, 302, 1377.
8. Fan, R.; Wu, Y.; Li, D.; Yue, M.; Majumdar, A.; Yang, P. J. Am. Chem. Soc. 2003, 125, 5254.
9. Abramson, A. R.; Kim, W. C.; Huxtable, S. T.; Yan, H.; Wu, Y.; Majumdar, A.; Tien, C,-L.; Yang, P. J. Microelectromech. Syst., 2004, 13, 505.
10. Tao, A.; Kim, F.; Hess, C.; Goldberger, J.; He, R.; Sun, Y.; Xia, Y.; Yang, P. Nano. Lett. 2003, 3, 1229.
11. Whang, D.; Jin, S.; Wu, Y.; Lieber, C. M. Nano Lett. 2003, 3, 1255.
12. Ng, H.; Han, J.; Yamada, T.; Nguyen, P.; Chen, Y. P.; Meyyappan, M. Nano Lett. 2004, 4, 1247.
13. Wagner, R. S.; Ellis, W. C. Appl. Phys. Lett. 1964, 4, 89.
14. Wagner, R. S. VLS Mechanism of Crystal Growth, in Whisker Technology, Levitt, A. P., Ed.; Wiley-Interscience: New York, 1970; pp 47-119.
15. Givargizov, E. I. J. Cryst. Growth 1975, 31, 20.
16. Morales, A. M.; Lieber, C. M. Science 1998, 279, 208.
17. Wu, Y.; Yang, P. J. Am. Chem. Soc. 2001, 123, 3165.
18. Wu, Y.; Yan, H.; Huang, M.; Messer, B.; Song, J.; Yang, P. Chem. Eur. J. 2002, 8, 1260.
19. Westwater, J.; Gosain, D. P.; Tomiya, S.; Usui, S.; Ruda, H. J. Vac. Sci. Technol. B 1997, 15, 554.
20. Gangloff, L.; Minoux, E.; Teo, K. B. K.; Vincent, P.; Semet, V.; Binh, V. T.; Yang, M. H.; Lacerda, R. G.; Bu, I. Y. Y.; Pirio, G.; Schnell, J. P.; Pribat, D.; Hasko, D. G.; Amaratunga, G. A. J.; Milne, W. I.; Legagneux, P. Nano Lett. 2004, 4, 1575.
21. Saif Islam, M.; Sharma, S.; Kamins, T. I.; Williams, R. S. Nanotechnology 2004, 15, L5.
22. Cui, Y.; Lauhon, L. J.; Gudiksen, M. S.; Wang, J.; Lieber, C. M. Appl. Phys. Lett. 2001, 78, 2214.
23. Wu, Y.; Cui, Y.; Huynh, L.; Barrelet, C. J.; Bell, D. C.; Lieber, C. M. Nano Lett. 2004, 4, 433.
24. Wu, Y.; Fan, R.; Yang, P. Nano Lett. 2002, 2, 83.
25. Vesenka, J.; Manne, D.; Giberson, T. M.; Henderson, E. Biophys. J. 1993, 65, 992.
26. Xia, Y.; Whitesides, G. M. Annu. Rev. Mater. Sci. 1998, 28, 153.