Imaging using electrons and ion beams

Focused Ion Beam Systems: Basics and Applications

Volumn 9780521831994, Issue , 2007, Pages 87-125

  Ohya, Kaoru ^a   Ishitani, Tohru ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY ALLOYS; BIOLOGICAL MATERIALS; COPPER ALLOYS; IMAGE RESOLUTION; ION BEAMS; IONS; LEAD; LEAD ALLOYS; MILLING (MACHINING); RANDOM ACCESS STORAGE; SCANNING; SCANNING ELECTRON MICROSCOPY; STATIC RANDOM ACCESS STORAGE; TIN ALLOYS; TRANSMISSION ELECTRON MICROSCOPY;

ADVANCED MATERIALS; BIOLOGICAL SPECIMENS; CROSS-SECTIONAL SAMPLE; D. TRANSMISSION ELECTRON MICROSCOPES (TEM); SCANNING ION MICROSCOPES; STATIC RANDOM ACCESS MEMORY; STRUCTURAL OBSERVATIONS; THE SCANNING ELECTRON MICROSCOPES (SEM);

TIN;

EID: 84926080443     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1017/CBO9780511600302.005     Document Type: Chapter

References (80)

1. K. Nikawa. J. Vac. Sci. Technol. B, 9 (1991), 2566-77.
2. T. Ishitani and T. Yaguchi. Microsc. Res. Tech., 35 (1996), 1320-33.
3. L. A. Giannuzzi and F. A. Stevie. Micron., 30 (1999), 197-204.
4. T. Ishitani and K. Ohya. Scanning, 25 (2003), 201-9.
5. T. Ishitani, H. Hirose and H. Tsuboi. J. Electron Microsc., 44 (1995), 110-14.
6. M. Utlaut. Handbook of Charged Particle Optics, ed. J. Orloff (New York: CRC Press, 1997), pp. 429-88.
7. Y. Sakai, T. Yamada, T. Suzuki et al. Appl. Phys. Lett., 73 (1998), 611-13.
8. Y. Sakai, T. Yamada, T. Suzuki and T. Ichinokawa. Appl. Surf. Sci., 73 (1999), 96-100.
9. T. Ishitani and H. Tsuboi. Scanning, 19 (1997), 489-97.
10. J. Orloff, M. Utlaut and L. Swanson. High Resolution Focused Ion beams: FIB and its Applications (New York: Kluwer Academic/Plenum Publishers, 2003).
11. J. I. Goldstein, D. E. Newbury, P. Echlin, et al. Scanning Electron Microscopy and X-ray Microanalysis (New York and London: Plenum Press, 1992).
12. L. Reimer. Scanning Electron Microscopy, 2nd edn (Berlin: Springer, 1998).
13. D. C. Joy. Inst. Phys. Conf. Ser. No. 93, 1 (1988), 23-32.
14. T. Ishitani. Jpn. J. Appl. Phys., 34 (1995), 3303-6.
15. L. Reimer. Image Formation in Low-Voltage Scanning Electron Microscopy (Washington, DC: SPIE Optical Engineering Press, 1993).
16. G. Dearnaley, J. H. Freeman, R. S. Nelson and J. Stephen. Ion Implantation (Amsterdam: North-Holland Publishers, 1973).
17. H. Ryssel and I. Ruge. Ion Implantation (New York: John Wiley & Sons, 1986).
18. Z. J. Ding and R. Shimizu. Scanning, 18 (1996), 92-113.
19. W. O. Hofer. Scanning Microsc. Suppl., 4 (1987), 265-310.
20. D. Hasselkamp, H. Rothard, K.-O. Groeneveld et al. Particle Induced Electron Emission II (Berlin: Springer-Verlag, 1992).
21. E. S. Parilis, L. M. Kishinevsky, N. Yu. Turaev et al. Atomic Collisions on Solid Surfaces (Amsterdam: North-Holland, 1993), pp. 391-473.
22. R. A. Baragiola, ed. Ionization of Solids by Heavy Particles (New York: Plenum Press, 1993).
23. R. A. Baragiola. Low Energy Ion-Surface Interactions, ed. J. W. Rabalais (Chichester: John Wiley and Sons, 1994), pp. 187-262.
24. J. Schou. Physical Processes of the Interaction of Fusion Plasmas with Solids, ed. W. O. Hofer and J. Roth (San Diego: Academic Press, 1996), pp. 177-216.
25. H. Kudo. Ion-Induced Electron Emission from Crystalline Solids (Berlin: Springer, 2002).
26. H. D. Hagstrum. Phys. Rev., 96 (1954), 325-35.
27. H. D. Hagstrum. Phys. Rev., 96 (1954), 336-65.
28. R. A. Baragiola, E. V. Alonso, J. Ferron and A. Oliva-Florio. Surf. Sci. 90, 240-55.
29. E. J. Sternglass. Phys. Rev., 108 (1957), 1-12.
30. J. Schou. Phys. Rev. B, 22 (1980), 2114-74.
31. M. Rosler. Ionization of Solids by Heavy Particles, ed. R. A. Baragiola (New York: Plenum Press, 1993), pp. 27-58.
32. P. M. Echenique, F. Flores and R. H. Ritchie. Solid State Physics: Advances in Research and Applications, Vol. 43, ed. H. Ehrenrech and D. Turnbull (New York: Academic Press, 1990), pp. 229-308.
33. I. Nagy, A. Arnau and P. M. Echenique. Phys. Rev. B, 38 (1988), 9191-3.
34. K. Ohya and T. Ishitani. J. Electron Microsc., 52 (2003), 291-8.
35. D. R. Penn. Phys. Rev. B, 35 (1987), 482-6.
36. J. C. Ashley. J. Electron Spectrosc. Relat. Phenom., 50 (1990), 323-34.
37. K. Ohya and J. Kawata. Jpn. J. Appl. Phys., 32 (1993), 1244-7.
38. H.-J. Fitting and J. Reinhardt. Phys. Status Solidi A, 88 (1985), 245-59.
39. R. A. Baragiola. Interaction of Charged Particles with Solids and Surfaces, ed. A. Gras-Marti, H. M. Urbassek, N. R. Arista and F. Flores (New York: Plenum Press, 1990), pp. 443-58.
40. G. Lakits, F. Aumayr, M. Heim and H. Winter. Phys. Rev. A, 42 (1990), 5780-3.
41. J. Lorincik, Z. Sroubek, H. Eder, F. Aumayr and H. Winter. Phys. Rev. B, 62 (2000), 16116-25.
42. K. Ohya and T. Ishitani. Surf. Coat. Technol., 158-159 (2002), 8-13.
43. W. Eckstein. Computer Simulation of Ion-Solid Interactions (Berlin: Springer-Verlag, 1991), pp. 4-32.
44. J. F. Ziegler, J. P. Biersack and U. Littmark. The Stopping and Ranges of Ions in Solids (New York: Pergamon Press, 1985), pp. 109-40.
45. T. Koshikawa and R. Shimizu. J. Phys. D: Appl. Phys., 7 (1974), 1303-15.
46. J. P. Ganachaud and M. Cailler. Surf. Sci., 83 (1979), 498-518.
47. Z. J. Ding, and R. Shimizu. Surf. Sci., 197 (1988), 539-54.
48. M. Kotera, R. Ijichi, T. Fujiwara, H. Suga and D. B. Wittry. Jpn. J. Appl. Phys., 29 (1990), 2277-82.
49. A. Dubus, J.-C. Dehaes, J. P. Ganachaud, A. Hafni and M. Cailler. Phys. Rev. B, 47 (1993), 11056-73.
50. J.-Ch. Kuhr and H.-J. Fitting. Phys. Stat. Sol. A, 172 (1999), 433-48.
51. K. Nishimura, J. Kawata and K. Ohya. Nucl. Instrum. And Meth. Phys. Res. B, 164-165 (2000), 903-9.
52. T. K. Olson, R. G. Lee and J. C. Morgan. Proc. 18th Int. Symp. Testing and Failure Analysis (1992), 373-380.
53. M. W. Phaneuf. Micron, 30 (1999), 277-88.
54. T. Ishitani, Y. Madokoro, M. Nakagawa and K. Ohya. J. Electron Microsc., 51 (2002), 207-13.
55. K. Ohya and T. Ishitani. Nucl. Instrum. Meth. Phys. Res. B, 202 (2003), 305-11.
56. K. Ohya, F. Aumayr and H. Winter. Phys. Rev. B, 4 (1992), 3101-4.
57. K. Ohya and J. Kawata. Scan. Microsc., 9 (1995), 331-53.
58. M. Kudo, Y. Sakai and T. Ichinokawa. Appl. Phys. Lett., 76 (2000), 3475-7.
59. K. Ohya. Proc. 3rd Int. Conf. Atomic Level Characterizations for New Materials and Devices: Nara (2001), 53-6.
60. K Ohya and T. Ishitani. J. Electron Microsc., 53 (2004), 229-35.
61. K. Ohya. J. Phys. Soc. Jpn., 61 (1992), 3013-14.
62. J. Kawata and K. Ohya. Radiat. Eff. Def. Sol., 130-131 (1994), 131-6.
63. K. Ohya and J. Kawata. Nucl. Instrum. Meth. Phys. Res. B, 90 (1994), 552-5.
64. P. D. Prewett and G. L. R. Mair. Focused Ion Beams From Liquid Metal Ion Sources (Taunton, UK: Research Studies Press Ltd, 1991).
65. B. A. Brusilovsky. Vacuum, 35 (1985), 595-615.
66. Y. Yahiro, K. Kaneko, T. Fujita, W.-J. Moon and Z. Horita. J. Electron Microsc., 53 (2004), 571-6.
67. E. S. Mashkova, V. A. Molchanov and D. D. Odintsov. Doklad. Akad. Nauk SSSR, 151 (1963), 1074-5; Engl. Transl.: Sov. Phys. Doklad., 8 (1964), 806-7.
68. J. Lindhard. Mat. Fys. Medd. Dan Vid. Selsk., 34 (1965).
69. T. Ishitani and T. Ohnishi. J. Vac. Sci. Technol. A, 9 (1991), 3084-9.
70. T. Ishitani, T. Ohnishi, Y. Madokoro and Y. Kawanami. J. Vac. Sci. Technol. B, 9 (1991), 2633-7.
71. T. Ohnishi, H. Koike, T. Ishitani et al. Proc. 25th Int. Symp. Testing and Failure Analysis (1999), 449-53.
72. T. Yaguchi, R. Urao, T. Kamino et al. Mater. Res. Soc. Symp. Proc., 636 (2001), D9.35.1-D9.35.6.
73. Y. Nemoto, Y. Miwa, M. Kikuchi et al. J. Nucl. Sci. Technol., 39 (2002), 996-1001.
74. T. Yaguchi, M. Konno, T. Kamino et al. Microsc. Microanal., 9 (2003), 118-19.
75. T. Yaguchi, Y. Kuroda, M. Konno et al. Hitachi Scientific Instrument News, 46 (2003), 18-20.
76. L. A. Giannuzzi, B. W. Kempshall, S. D. Anderseon, B. I. Prenitzer and T. M. Moore. Microelectronic Failure Analysis Desk Reference Supplement (2002) 29-35.
77. A. Tonomura, H. Kasai, O. Kamimura et al. Phys. Rev. Lett., 88 (2002), 237001.
78. T. Ishitani, Y. Taniguchi, S. Isakizawa et al. J. Vac. Sci. Technol. B, 16 (1998), 2532-7.
79. M. Nakagawa, R. Dunne, K. Koike et al. J. Electron Microsc., 51 (2002), 53-7.
80. M. V. Moore. Scanning, 25 (2003), 159-60.