Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2532-2537

  Ishitani, T ^a   Taniguchi, Y ^a   Isakozawa, S ^a   Koike, H ^a   Yaguchi, T ^a   Matsumoto, H ^a   Kamino, T ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037848191     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590204     Document Type: Article

References (10)

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