Comparison in spatial spreads of secondary electron information between scanning ion and scanning electron microscopy

Scanning

Volumn 25, Issue 4, 2003, Pages 201-209

  Ishitani, Tohru ^a   Ohya, Kaoru ^a,b  

^a HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Monte Carlo simulation; Scanning electron microscope; Scanning ion microscope; Secondary electrons; Spatial information

Indexed keywords

GALLIUM; IMAGING TECHNIQUES; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY;

SECONDARY ELECTRONS (SE);

ELECTRONS;

GALLIUM; ION;

ARTICLE; ELECTRON; ELECTRON PROBE MICROANALYSIS; IMAGING SYSTEM; INTERMETHOD COMPARISON; MONTE CARLO METHOD; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SCANNING ION MICROSCOPY;

EID: 0043092452     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950250407     Document Type: Article

References (20)

1. Baragiola RA: Current Topics in Kinetic Electron Emission from Solids. Interaction of Charged Particles with Solids and Surfaces (NATO ASI Series B: Physics vol. 271). (Ed. Gras-Marti A, Urbassek H M, Arista N R, Flores F) Plenum, New York (1990) 443-458
2. Baragiola RA, Alonso EV, Ferron J, Oliva-Florio A: Ion-induced electron emission from clean metals. Surface Sci 90, 240-255 (1979)
3. Ding ZJ, Tang XD, Shimizu R: Monte Carlo study of secondary electron emission. J Appl Phys 89, 718-726 (2001)
4. Gauvin P, Hovington P, Drouin D: Quantification of spherical inclusions in the scanning electron microscope using Monte Carlo simulations. Scanning 17, 202-219 (1995)
5. Goldstein JI, Newbury DE, Echlin P, Joy DC, Roming, Jr., AD, Lyman CE, Fiori, C, Lifshin E: Scanning Electron Microscopy and X-ray Microanalysis. Sec. Prenum Press, New York and London (1992) Chapter 3
6. Ishitani T, Tsuboi H: Objective comparison of scanning ion and scanning electron microscope images. Scanning 19, 489-497 (1997)
7. Ishitani T, Madokoro Y, Nakagawa M, Ohya K: Origins of material contrast in scanning ion microscope images. J Electron Micro 51, 207-213 (2002)
8. Joy DC: A database on electron-Solid Interactions. Data available at http://pciserver.bio.utk.edu/metrology/ Scanning 17, 270-275 (1995)
9. Kudo M, Sakai Y, Ichinokawa T: Dependencies of secondary electron yields on work function for metals by electron and ion bombardment. Appl Phys Lett 76, 3475-3477 (2000)
10. Lakits G, Aumayr F, Heim M, Winter H: Threshold of ion-induced kinetic electron emission from a clean metal surface. Phys Rev A 42, 5780-5783 (1990)
11. Ly TD, Howitt DG, Farrens MK, Harker AB: Monte Carlo calculations with microstructures. Scanning 17, 220-226 (1995)
12. Ohya K: Monte Carlo simulation of heavy ion induced kinetic electron emission from an Al surface. Nucl Instrum Method B195, 281-290 (2002)
13. Ohya K, Ishitani T: Target material dependence of secondary electron images induced by focused ion beams. Surf Coat Technol 8-13, 158-159 (2002)
14. Ohya K, Ishitani T: Simulation study of secondary electron images in scanning ion microscopy. Nucl Instrum Method B 202, 305-311 (2003a)
15. Ohya K, Ishitani T: Comparative study of depth and lateral distributions of electron excitation between scanning ion and scanning electron microscopes. J Electron Microsc 52 (2003b) (in press)
16. Ohya K, Kawata J: Simulation of electron emission from beryllium under electron and ion bombardment. Scanning Microsc 9, 331-353 (1995)
17. Ohya K, Kawata J: Comparative study of kinetic electron emission from solids under ion and electron impacts. Nucl Instrum Method B 115, 265-268 (1996)
18. Reimer L: Scanning Electron Microscopy. Springer-Verlag, New York (1998) Chapters 3, 4
19. Rau EI, Reimer L: Fundamental problems of imaging subsurface structures in the backscattered electron mode in scanning electron microscopy. Scanning 23, 235-240 (2001)
20. Sakai Y, Yamada T, Suzuki T, Sato T, Itoh H, Ichinokawa T: Contrast mechanisms in scanning ion microscope imaging for metals. Appl Phys Lett 73, 611-613 (1998)