Simulation study of secondary electron images in scanning ion microscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 202, Issue , 2003, Pages 305-311

  Ohya, K ^a   Ishitani, T ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Focused ion beam; Monte Carlo simulation; Scanning ion microscopy; Secondary electron emission

Indexed keywords

COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); ELECTRONS; GALLIUM; SCANNING ELECTRON MICROSCOPY;

SCANNING ION MICROSCOPY (SIM);

ION BOMBARDMENT;

EID: 0037378223     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01874-8     Document Type: Conference Paper

References (25)

1. Sakai Y., Yamada T., Suzuki T., Sato T., Itoh H., Ichinokawa T. Appl. Phys. Lett. 73:1998;611.
2. Ishitani T., Madokoro Y., Nakagawa M., Ohya K. J. Electron Microsc. 51:2002;207.
3. Ohya K., Ishitani T. Surf. Coat. Technol. 158-159:2002;8.
4. Baragiola R.A., Alonso E.V., Ferrón J., Oliva-Florio A. Surf. Sci. 90:1979;240.
5. Nagy I., Anau A., Echenique P.M. Phys. Rev. B. 38:1988;9191.
6. Koonin S.E., Meredith D.C. Computational Physics. 1990;Addison-Wesley, Redwood. p. 103.
7. Salvat F., Parellada J. J. Phys. D. 17:1984;1545.
8. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solids. 1985;Pergamon, New York. p. 264.
9. Biersack J.P., Haggmark L.G. Nucl. Instr. and Meth. 174:1980;256.
10. Rösler M. Baragiola R.A. Ionization of Solids by Heavy Particles. 1993;27 Plenum, New York.
11. Ohya K., Kawata J. Scanning Microsc. 9:1995;331.
12. Fitting H.J., Reinhardt J. Phys. Status Solidi A. 88:1985;245.
13. Tung C.J., Ritchie R.H. Phys. Rev. B. 16:1977;4302.
14. Palik E.D. Handbook of Optical Constants of Solids. 1985;Academic, Boston.
15. Palik E.D. Handbook of Optical Constants of Solids II. 1991;Academic, Boston.
16. Ashley J.C. J. Electron Spectrosc. Relat. Phenom. 50:1990;323.
17. Nishimura K., Kawata J., Ohya K. Nucl. Instr. and Meth. B. 164-165:2000;903.
18. Baragiola R.A., Alonso E.V., Oliva-Florio A. Phys. Rev. B. 19:1979;121.
19. Svensson B., Holmén G. J. Appl. Phys. 52:1981;6928.
20. Zalm P.C., Beckers L.J. Philipps J. Res. 39:1984;61.
21. Baragiola R.A. Rabalais Low Energy Ion-Surface Interactions. 1994;187 John Wiley & Sons, Chichester.
22. Lörincík J., Sroubek Z., Eder H., Aumayr F., Winter H. Phys. Rev. B. 62:2000;16116.
23. Hellwege K.-H., Olsen J.L. Electron states and Fermi surfaces of elements. Numerical Data and Functional Relationships in Science and Technology. Vol. 13:1984;Springer, Berlin.
24. Lide D.R. Handbook of Chemistry and Physics. 1993;CRC, Boca Raton.
25. Kittel C. Introduction to Solid State Physics. sixth ed. 1986;248 John Wiley & Sons, New York.