Crystallographic orientation contrast associated with Ga+ ion channelling for Fe and Cu in focused ion beam method

Journal of Electron Microscopy

Volumn 53, Issue 5, 2004, Pages 571-576

  Yahiro, Y ^a   Kaneko, K ^a   Fujita, T ^a   Moon, W J ^a   Horita, Z ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

bcc crystal; fcc crystal; Focused ion beam; Ga+ ion; Ion channelling; Secondary electron

Indexed keywords

COPPER; GALLIUM; IRON;

ARTICLE; CHEMISTRY; CRYSTALLOGRAPHY; SCANNING ELECTRON MICROSCOPY;

COPPER; CRYSTALLOGRAPHY; GALLIUM; IRON; MICROSCOPY, ELECTRON, SCANNING;

COPPER; CRYSTAL ORIENTATION; FOCUSED ION BEAMS; GALLIUM COMPOUNDS; IONS; IRON; SECONDARY EMISSION;

BCC CRYSTAL; CRYSTALLOGRAPHIC ORIENTATIONS; CRYSTALS STRUCTURES; ELECTRON INTENSITY; FOCUSED IONS BEAMS; FOCUSED-ION-BEAM SYSTEM; GA+ ION, FCC; ION BEAM METHOD; ION CHANNELLING; SECONDARY ELECTRONS;

SINGLE CRYSTALS;

EID: 13444250060     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/jmicro/dfh075     Document Type: Article

References (14)

1. Giannuzzi L A and Stevie F A A review of focused ion beam milling techniques for TEM specimen preparation. Micron 30: (1999) 197-204.
2. Hytch M J and Chevalier J P The effect of amorphous surface layers on HREM images of crystalline material. Proc. of ICEM 13 Paris (1994). 367-368.
3. Kirk E C G, Williams D A, and Ahmed H Cross-sectional transmission electron microscopy of precisely selected regions from semiconductor devices. Inst. Phys. Conf. Ser. 100: (1989) 501-506.
4. Gupta J, Harper J M E, Mauer J L IV, Blauner P G, and Smith D A Focused ion beam imaging of grain growth in copper thin films. Appl. Phys. Lett. 61: [6] (1992) 663-665.
5. Wang K, Garoche P, and Dumoulin L Focused ion beam imaging of grains in Al-Li-Cu Quasicrystal. J. Phys.: Condens. Matter 10: (1998) 3479-3488.
6. Ishitani T and Tsuboi H Objective Comparison of Scanning Ion and Scanning Electron Microscope Images. Scanning 19: (1997) 489-497.
7. Ishitani T, Madokoro Y, Nakagawa M, and Ohya K Origins of Material Contrast in Scanning Ion Microscope Images. J. Electron. Microsc. 51: [4] (2002) 207-213.
8. Sakai Y, Yamada T, Suzuki T, Sato T, Itoh H, and Ichinokawa T Contrast mechanisms in scanning ion microscope imaging for metals. Appl. Phy. Lett. 73: [5] (1998) 611-614.
9. Franklin R E, Kirk E C G, Cleaver J R A, and Ahmed H Channelling ion image contrast and sputtering in gold specimens observed in a high-resolution scanning ion microscope. J. Mater. Sci. Lett. 7: (1988) 39-41.
10. Nikawa K Application of focused ion beam technique to failure analysis of very large scale integrations: A review. J. Vac. Sci. Technol. B 9: [5] (1991) 2566-2577.
11. Barr D L and Brown W L Contrast formation in focused ion beam images of polycrystalline aluminum. J. Vac. Sci. Technol. B 13: [6] (1995) 2580-2583.
12. Kempshall B W and Schwarz S M Ion channeling effects on the focused ion beam milling of Cu. J. Vac. Sci. Technol. B 19: [3] (2001) 749-754.
13. Lindhard J Motion of swift charged particles, as influenced by strings of atoms in crystals. Phy. Lett. 12: [2] (1964) 126-128.
14. Brusilovsky B A Directional effects in kinetic ion-electron emission. Vacuum 35: [12] (1985) 595-615.