Contrast mechanisms in scanning ion microscope imaging for metals

Applied Physics Letters

Volumn 73, Issue 5, 1998, Pages 611-613

  Sakai, Y ^a   Yamada, T ^a   Suzuki, T ^a   Sato, T ^b   Itoh, H ^b   Ichinokawa, T ^b  

^a JEOL LTD   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000405557     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121872     Document Type: Review

References (7)

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7. Ion Implantation, Sputtering and their Applications, edited by P. D. Townsend, C. Kelly, and N. E. W. Hartley (Academic, London, 1976), Chap. 2.