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Volumn 51, Issue 4, 2002, Pages 207-213
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Origins of material contrast in scanning ion microscope images
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HITACHI LTD
(Japan)
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Author keywords
Atomic number contrast; Material contrast; Scanning electron microscope; Scanning ion microscope; Secondary electron yield; Secondary electrons
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Indexed keywords
ARTICLE;
ATOMS;
ELECTRONS;
INTELLIGENT SYSTEMS;
MONTE CARLO METHODS;
SCANNING ELECTRON MICROSCOPY;
SECONDARY EMISSION;
ATOMIC NUMBER CONTRAST;
ELECTRON MICROSCOPE IMAGES;
EXCITED ELECTRONS;
MATERIAL CONTRAST;
MICROSCOPE IMAGES;
SCANNING ELECTRON MICROSCOPE;
SCANNING ELECTRONS;
SCANNING ION MICROSCOPES;
SECONDARY ELECTRON YIELD;
SECONDARY ELECTRONS;
IONS;
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EID: 0036371167
PISSN: 00220744
EISSN: None
Source Type: Journal
DOI: 10.1093/jmicro/51.4.207 Document Type: Article |
Times cited : (27)
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References (20)
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